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ZnO nanorods based ammonia gas sensors with interdigitized electrodes

机译:带有叉指电极的基于ZnO纳米棒的氨气传感器

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摘要

The ZnO nanorods-based ammonia (NH_3) gas sensors with different electrode spacing are fabricated and studied. Experimentally, the hexagonal ZnO nanorods were prepared by a hydrothermal method. The diameter and length of ZnO nanorods were about 179±2, 1806±5 nm, respectively. By shrinking the electrode spacing, the sensor response of studied device is improved and the sensor response is enhanced more than ten times in magnitude. The improved NH_3 sensing ability caused by shrink electrode spacing is attributed to the presence of more grain boundaries and depletion layers. Therefore, the studied device with the shrink of electrode spacing provides a promise for high-performance ammonia sensing applications.
机译:制作并研究了电极间距不同的基于ZnO纳米棒的氨气(NH_3)气体传感器。实验上,通过水热法制备了六角形的ZnO纳米棒。 ZnO纳米棒的直径和长度分别约为179±2、1806±5 nm。通过缩小电极间距,可以改善所研究设备的传感器响应,并将传感器响应的幅度提高十倍以上。由收缩电极间距引起的改善的NH_3感测能力归因于存在更多的晶界和耗尽层。因此,具有减小的电极间距的研究装置为高性能氨感测应用提供了希望。

著录项

  • 来源
  • 会议地点 Kunming(CN);Kunming(CN)
  • 作者单位

    Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University,1 University Road, Tainan, TAIWAN 70101, Republic of China;

    Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University,1 University Road, Tainan, TAIWAN 70101, Republic of China;

    Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University,1 University Road, Tainan, TAIWAN 70101, Republic of China;

    Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University,1 University Road, Tainan, TAIWAN 70101, Republic of China;

    Department of Chemical Engineering, National Cheng-Kung University, 1 University Road, Tainan,TAIWAN 70101, Republic of China;

    Department of computer science and information engineering, Chaoyang University of Technology,Taichung County, TAIWAN 50094, Republic of China;

    Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University,1 University Road, Tainan, TAIWAN 70101, Republic of China;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料一般性问题;
  • 关键词

    ZnO nanorods; potential barrier; NH_3; electrode spacing;

    机译:ZnO纳米棒;潜在障碍NH_3;电极间距;

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