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Investigation of the micro-mechanical properties of femtosecond laser-induced phases in amorphous silica

机译:飞秒激光诱导非晶态二氧化硅相的微机械性能研究

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Femtosecond pulses used in the regime where self-organized patterns are found have two noticeable effects in amorphous silica's (a-SiO_2) optical and chemical properties: The decrease of the material's refractive index as well as an enhanced etching selectivity. However, the effect on the material mechanical properties is unexplored. In this paper, we present elastic modulus measurements of fused silica exposed to femtosecond laser pulses in the regime where nanogratings are found. The measurement principle is based on the use of femtosecond laser fabricated displacement amplification mechanism combined with a discrete stiffness model. In this laser exposure regime, a significant decrease of the elastic modulus is observed. Our findings are consistent with the existence of a porous structure found within nanogratings lamellas..
机译:在发现自组织图形的状态下使用的飞秒脉冲对非晶态二氧化硅(a-SiO_2)的光学和化学性质有两个明显的影响:材料折射率的降低以及蚀刻选择性的提高。但是,对材料机械性能的影响尚待探讨。在本文中,我们介绍了在发现纳米光栅的情况下暴露于飞秒激光脉冲的熔融石英的弹性模量测量结果。测量原理基于飞秒激光制造的位移放大机制与离散刚度模型的结合。在这种激光曝光方案中,观察到弹性模量显着降低。我们的发现与纳米光栅薄片中存在的多孔结构一致。

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