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首页> 外文会议>Frontiers in ultrafast optics: biomedical, scientific, and industrial applications XVI >Progress on femtosecond laser-based system-materials: three-dimensional monolithic electrostatic micro-actuator for optomechanics
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Progress on femtosecond laser-based system-materials: three-dimensional monolithic electrostatic micro-actuator for optomechanics

机译：飞秒激光基系统材料的研究进展：用于光机械的三维整体式静电微驱动器

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摘要

Femtosecond laser-dielectric interaction in a three-dimensional (3D) manner defines a capable platform for integrated 3D micro-devices fabricated out of a single piece of system-material. Here, we add a new function to femtosecond laser-based single monolith in amorphous fused silica by demonstrating a transparent 3D micro-actuator using non-ablative femtosecond laser micromachining with subsequent chemical etching. The actuation principle is based on dielectrophoresis (DEP), defined as the unbalanced electrostatic action on dielectrics, due to an induced dipole moment under a non-uniform electric field. An analytical model of this actuation scheme is proposed, which is capable of performance prediction, design parameter optimization and motion instability analysis. Furthermore, the static and dynamic performances are experimentally characterized using optical measurement methods. An actuation range of 30 μm is well attainable; resonances and the settling time in transient responses are measured; the quality factor and the bandwidth for the primary vertical resonance are also evaluated. Experimental results are in good consistence with theoretical analyses. The proposed actuation principle suppresses the need for electrodes on the mobile, non-conductive component and is particularly interesting for moving transparent elements. Thanks to the flexibility of femtosecond laser manufacturing process, this actuation scheme can be integrated in other functionalities within monolithic transparent Micro-Electro-Mechanical Systems (MEMS) for applications like resonators, adaptive lenses and integrated photonics circuits.
机译：飞秒激光-介电相互作用以三维（3D）方式定义了一个功能强大的平台，可用于由单片系统材料制成的集成3D微型设备。在这里，我们通过演示使用非烧蚀飞秒激光微加工和随后的化学蚀刻的透明3D微致动器，为非晶态熔融石英中的飞秒激光基单块增加了新功能。激活原理基于介电电泳（DEP），其定义为由于非均匀电场下感应的偶极矩而导致的对电介质的不平衡静电作用。提出了该驱动方案的分析模型，该模型能够进行性能预测，设计参数优化和运动不稳定性分析。此外，使用光学测量方法对静态和动态性能进行了实验表征。可以达到30μm的驱动范围。测量瞬态响应中的谐振和建立时间；还评估了一次垂直共振的品质因数和带宽。实验结果与理论分析吻合良好。所提出的致动原理抑制了对在移动的非导电部件上的电极的需求，并且对于移动透明元件尤其令人感兴趣。由于飞秒激光器制造工艺的灵活性，该激励方案可以集成到单片透明微机电系统（MEMS）中的其他功能中，以用于谐振器，自适应透镜和集成光子电路等应用。

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