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首页> 外文会议>Frontiers in ultrafast optics: biomedical, scientific, and industrial applications XVI >Advanced optic fabrication using ultrafast laser radiation
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Advanced optic fabrication using ultrafast laser radiation

机译：使用超快激光辐射的先进光学制造

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摘要

Advanced fabrication and finishing techniques are desired for freeform optics and integrated photonics. Methods including grinding, polishing and magnetorheological finishing used for final figuring and polishing of such optics are time consuming, expensive, and may be unsuitable for complex surface features while common photonics fabrication techniques often limit devices to planar geometries. Laser processing has been investigated as an alternative method for optic forming, surface polishing, structure writing, and welding, as direct tuning of laser parameters and flexible beam delivery are advantageous for complex freeform or photonics elements and material-specific processing. Continuous wave and pulsed laser radiation down to the nanosecond regime have been implemented to achieve nanoscale surface finishes through localized material melting, but the temporal extent of the laser-material interaction often results in the formation of a sub-surface heat affected zone. The temporal brevity of ultrafast laser radiation can allow for the direct vaporization of rough surface asperities with minimal melting, offering the potential for smooth, final surface quality with negligible heat affected material. High intensities achieved in focused ultrafast laser radiation can easily induce phase changes in the bulk of materials for processing applications. We have experimentally tested the effectiveness of ultrafast laser radiation as an alternative laser source for surface processing of monocrystalline silicon. Simulation of material heating associated with ultrafast laser-material interaction has been performed and used to investigate optimized processing parameters including repetition rate. The parameter optimization process and results of experimental processing will be presented.
机译：对于自由形式的光学器件和集成的光子学，需要先进的制造和精加工技术。用于此类光学器件的最终成型和抛光的方法包括打磨，抛光和磁流变精加工，既耗时，昂贵，又可能不适用于复杂的表面特征，而常见的光子学制造技术通常将器件限制在平面几何形状内。已经研究了激光加工作为光学成型，表面抛光，结构写入和焊接的替代方法，因为直接调整激光参数和灵活的光束传输对于复杂的自由形式或光子元件和特定于材料的加工是有利的。已经实现了持续到纳秒级的连续波和脉冲激光辐射，以通过局部材料熔化实现纳米级表面光洁度，但是激光材料相互作用的时间范围常常导致形成次表面热影响区。超快激光辐射的短暂时间可以使粗糙表面的粗糙表面直接汽化，而熔化却最少，从而可以通过忽略不计的热影响材料来提供光滑，最终的表面质量。在聚焦的超快激光辐射中获得的高强度可以轻松地在用于加工应用的大部分材料中引起相变。我们已经通过实验测试了超快激光辐射作为单晶硅表面处理的替代激光源的有效性。已经进行了与超快激光-材料相互作用相关的材料加热模拟，并用于研究优化的加工参数（包括重复率）。将介绍参数优化过程和实验处理结果。

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  • 来源
  • 会议地点 San Francisco CA(US)
  • 作者

    Lauren L. Taylor; Jun Qiao; Jie Qiao;

  • 作者单位

    Chester F. Carlson Center for Imaging Science, Rochester Institute of Technology 54 Lomb Memorial Drive, Rochester NY USA 14623;

    Chester F. Carlson Center for Imaging Science, Rochester Institute of Technology 54 Lomb Memorial Drive, Rochester NY USA 14623,College of Materials Science and Metallurgy, The University of Science and Technology Liaoning, 185, Qianshan Middle Road, Anshan, Liaoning, P.R. China 114051;

    Chester F. Carlson Center for Imaging Science, Rochester Institute of Technology 54 Lomb Memorial Drive, Rochester NY USA 14623;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Ultrafast laser processing; optics fabrication;

    机译：超快激光加工；光学制造;

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