LOCAL CARBON NANOTUBES GROWTH IN POROUS ANODIC ALUMINIUM OXIDE

机译：多孔阳极氧化铝中碳纳米管的生长

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Technology of carbon nanotubes (CNT) growth on porous aluminum oxide membrane for cold electron emitting devices was investigated. Porous Al_2O_3 30-40μm thick substrate covered with catalyst (Co or Ni) was used as template for high oriented and patterned CNT growth. The growth of CNTs was performed by microwave plasma assisted chemical vapor deposition (MWPACVD) method in CH_4:H_2 and CH_4:CO_2 working gas mixtures in pulsed and CW mode operation. During the deposition period the negative bias voltage was applied to the substrate holder. It was found, that CNT growth takes place in both directions from catalyst layer. The condition of CNT protruding through the membrane, the shape and height of CNT tips on the other side of the membrane, and the effect of biasing on aligned CNT growth are investigated.

机译：研究了在冷电子发射器件的多孔氧化铝膜上生长碳纳米管的技术。以多孔的Al_2O_330-40μm厚的被催化剂（Co或Ni）覆盖的基底作为模板，用于高取向和图案化的CNT生长。 CNT的生长是通过微波等离子体辅助化学气相沉积（MWPACVD）方法在CH_4：H_2和CH_4：CO_2工作气体混合物中以脉冲和CW模式进行的。在沉积期间，将负偏压施加到衬底支架。已经发现，CNT的生长在催化剂层的两个方向上发生。研究了CNT穿过膜突出的条件，在膜另一侧的CNT尖端的形状和高度以及偏压对对准的CNT生长的影响。

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来源
《Fullerenes and Nanotubes: The Building Blocks of Next Generation Nanodevices: Fullorenes》|2003年|P.405-410|共6页
会议地点 Paris(FR);Paris(FR);Paris(FR)
作者
V.V. Dvorkin; N.N. Dzbanovsky; N.V. Suetin; E.A. Poltoratsky; G.S. Richkov; E.A. Ilichev; S.A. Gavrilov;
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作者单位

Institute of Nuclear Physics, Moscow State University, Moscow 119899, Russia;

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原文格式 PDF
正文语种 eng
中图分类无机高分子化合物（高聚物）;
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专利

1. Anodic Aluminium Oxide Membranes Used for the Growth of Carbon Nanotubes [J] . Vicente Lopez, Carmen Morant, Francisco Marquez, Journal of nanoscience and nanotechnology . 2009,第11期

机译：用于碳纳米管生长的阳极氧化铝膜
2. Coaxial carbon-silicon-carbon nanotube arrays in porous anodic aluminum oxide templates as anodes for lithium ion batteries [J] . Chenglong Zhao, Qi Li, Wang Wan Journal of Materials Chemistry: An Interdisciplinary Journal dealing with Synthesis, Structures, Properties and Applications of Materials, Particulary Those Associated with Advanced Technology . 2012,第24期

机译：多孔阳极氧化铝模板中的同轴碳-硅-碳纳米管阵列作为锂离子电池的阳极
3. Coaxial carbon-silicon-carbon nanotube arrays in porous anodic aluminum oxide templates as anodes for lithium ion batteries [J] . Chenglong Zhao, Qi Li, Wang Wan Journal of Materials Chemistry: An Interdisciplinary Journal dealing with Synthesis, Structures, Properties and Applications of Materials, Particulary Those Associated with Advanced Technology . 2012,第24期

机译：多孔阳极氧化铝模板中的同轴碳-硅-碳纳米管阵列作为锂离子电池的阳极
4. LOCAL CARBON NANOTUBES GROWTH IN POROUS ANODIC ALUMINIUM OXIDE [C] . V. V. Dvorkin, N. N. Dzbanovsky, N. V. Suetin, International symposium on fullerenes, nanotubes, and carbon nanoclusters . 2003

机译：多孔阳极氧化铝中的局部碳纳米管生长
5. Ordered carbon nanotube growth and optical reflectance in porous anodic alumina templates. [D] . Zuidema, John Arthur. 2010

机译：多孔阳极氧化铝模板中有序的碳纳米管生长和光反射率。
6. Chemical Synthesis Characterisation and Biocompatibility of Nanometre Scale Porous Anodic Aluminium Oxide Membranes for Use as a Cell Culture Substrate for the Vero Cell Line: A Preliminary Study [O] . Gérrard Eddy Jai Poinern, Xuan Thi Le, Mark ODea, -1

机译：纳米级多孔阳极氧化铝膜的化学合成表征和生物相容性用作Vero细胞系的细胞培养底物：初步研究
7. Controlled pore diameter in porous anodic aluminium oxide templates for nanotube/nanowire fabrication [O] . Subari Noor Fariza, Sakrani Samsudi, Raja Ibrahim Raja Kamarulzaman 2012

机译：用于纳米管/纳米线制造的多孔阳极氧化铝模板中的受控孔径

LOCAL CARBON NANOTUBES GROWTH IN POROUS ANODIC ALUMINIUM OXIDE

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