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Improving the red wavelength sensitivity of CCDs

机译:改善CCD的红色波长灵敏度

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The demand for higher red wavelength sensitivity is being met by various technological developments of modern CCDs. We discuss techniques for achieving higher red wavelength sensitivity by using thicker silicon to make backthinned CCDs, which combines with very low read noise for enhanced sensitivity. Thicker devices requires higher resistivity material including bulk (non epitaxial) silicon. An extended wavelength range also places more demand on the anti-reflection coatings which benefit from corresponding optimisation.
机译:现代CCD的各种技术发展已满足了对更高的红色波长灵敏度的需求。我们讨论了通过使用较厚的硅来制作背面变薄的CCD来实现更高的红色波长灵敏度的技术,该技术结合了非常低的读取噪声以提高灵敏度。较厚的器件需要更高电阻率的材料,包括块状(非外延)硅。扩展的波长范围还对防反射涂层提出了更多要求,这得益于相应的优化。

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