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New low-cost high heat flux source

机译:新型低成本高热通量源

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Abstract: Intense heat sources are needed to address new manufacturing techniques, such as, the Rapid Thermal Process for silicon wafer manufacturing. The current technology of high heat flux sources is the laser for its ability to do welding and cutting is well- known. The laser with its coherent radiation allows an image to be focused down to very small sizes to reach extremely high heat flux. But the laser also has problems: it is inefficient in its use because of its singular wave length and brings up OSHA safety related problems. Also heavy industrial manufacturing requires much higher total energy in addition to the high heat flux which makes the current laser system too slow to be economical. The system I am proposing starts with a parabolic curve. If the curve is rotated about the axis of the parabola, it generates the classical parabolic reflector as we know it. On the other hand, when the curve is rotated about the chord, a line passing through the focal point and perpendicular to the axis, generates a new surface called the Orthogonal Parabolic Surface. A new optical reflector geometry is presented which integrates a linear white light (continuum spectra) source through a coherent path to be focused to a very small area. !3
机译:摘要:需要强大的热源来解决新的制造技术,例如用于硅片制造的快速热处理。高热通量源的当前技术是激光,因为激光具有进行焊接和切割的能力。具有相干辐射的激光可以将图像聚焦到非常小的尺寸,以达到极高的热通量。但是激光也有问题:由于其奇异的波长,其使用效率低下,并带来了与OSHA安全相关的问题。同样,重型工业制造除了需要高的热通量之外,还需要更高的总能量,这使得当前的激光系统太慢而不能经济。我建议的系统从抛物线开始。如果曲线绕抛物线的轴旋转,则会生成我们所知的经典抛物线反射器。另一方面,当曲线绕弦旋转时,一条穿过焦点并垂直于轴的线会生成一个称为“正交抛物面”的新曲面。提出了一种新的光学反射器几何形状,该几何形状通过相干路径集成了线性白光(连续光谱)源,以将其聚焦到非常小的区域。 !3

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