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Laser-induced plasma-assisted ablation (LIPAA): fundamental and industrial applications

机译：激光诱导等离子体辅助消融（LIPAA）：基础和工业应用

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摘要

The laser-induced plasma-assisted ablation (LIPAA) process developed by our group, in which a single conventional pulsed laser is only used, makes it possible to perform high-quality and high-speed glass microfabrication. Up to the present, this process has been widely applied for micromachining of various transparent hard and soft materials. In this process, the laser beam first passes through the glass substrate since the laser beam has no absorption by the substrate. Then, the transmitted beam is absorbed by a solid target (typically a metal), located behind the substrate so that the target is ablated, resulting in plasma generation. Due to the interaction of the laser beam and the laser-induced plasma, significant ablation takes place at the rear surface of the substrate. Recently, we have developed the proto-type LIPAA system using a second harmonic of diode pumped Q-switched NdiYAG laser for the practical use. In this paper, we demonstrate micromachining, crack-free marking and color marking of glass materials. Additionally, selective metallization of glass and polyimide by the LIPAA process followed by metal chemical-plating is investigated. A possible mechanism of LIPAA is also discussed based on the results from double pulse irradiation using near-IR fs laser, transient absorption measurement and plasma-conductivity measurement.
机译：我们小组开发的激光诱导等离子体辅助烧蚀（LIPAA）工艺，仅使用单个常规脉冲激光，就可以进行高质量，高速的玻璃微加工。迄今为止，该方法已广泛用于各种透明的硬质和软质材料的微加工。在该过程中，激光束首先穿过玻璃基板，因为激光束没有被基板吸收。然后，透射束被位于基板后方的固体靶材（通常是金属）吸收，从而烧蚀了靶材，从而产生了等离子体。由于激光束和激光诱导的等离子体的相互作用，在基板的后表面处发生明显的烧蚀。最近，我们已经开发出了使用二极管泵浦Q开关NdiYAG激光器的二次谐波的LIPAA原型系统。在本文中，我们演示了玻璃材料的微加工，无裂纹标记和彩色标记。此外，还研究了通过LIPAA工艺对玻璃和聚酰亚胺进行选择性金属镀敷，然后进行化学镀。还基于使用近红外fs激光器的双脉冲辐照，瞬态吸收测量和等离子体电导率测量的结果，讨论了LIPAA的可能机理。

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