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首页> 外文会议>High-Power Laser Ablation VI pt.1 >Laser produced x-ray by high brightness and power diode pumped Nd:YAG laser for compact x-ray lithography and microscopy
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Laser produced x-ray by high brightness and power diode pumped Nd:YAG laser for compact x-ray lithography and microscopy

机译：高亮度和功率二极管泵浦Nd：YAG激光器产生的X射线激光，用于紧凑的X射线光刻和显微镜检查

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摘要

High Brightness and Power Diode Pumped Nd:YAG Laser is the engine for Laser Produced X-ray (LPX). The LPX system consists of a compact diode pumped Nd:YAG laser system which produces brightness in excess of 10~(15) W/cm~2 on target at up to 300 watts average power (4 parallel beams). The MOPA (Master Oscillator Power Amplifier) laser system delivers 250 mJ/pulse @ 300 Hz per beam (75 W average). 4 beams system at 300 W average power was demonstrated. The high brightness is achieved using ～ 800 ps pulse duration and near diffraction limited beam quality. Very high conversion efficiency (～ 9%) into 2π sr from 1064 nm laser output to 1 nm broadband x-ray was demonstrated using copper tape target. 1 nm x-rays were used for proximity x-ray lithography and demonstrated feature size resolution down to 75 nm. Narrow linewidth x-ray (λ/Δλ ～ 600) has also been demonstrated with 1% conversion efficiency from 532 nm to 3.37 nm using Mylar tape target for compact high resolution and contrast x-ray tomography for biological cells. A unique mechanical shutter was developed to stop all the ablated debris from the target material that can damage and contaminate the fragile x-ray optics.
机译：高亮度和功率二极管抽运的Nd：YAG激光是产生X射线（LPX）的引擎。 LPX系统由紧凑的二极管泵浦Nd：YAG激光系统组成，该系统可在目标上以超过300瓦的平均功率（4个平行光束）产生超过10〜（15）W / cm〜2的亮度。 MOPA（主振荡器功率放大器）激光系统每束300 Hz时可产生250 mJ /脉冲（平均75 W）。演示了平均功率为300 W的4光束系统。使用〜800 ps的脉冲持续时间和接近衍射限制的光束质量可以实现高亮度。使用铜带靶标证明了从1064 nm激光输出到1 nm宽带X射线到2πsr的非常高的转换效率（〜9％）。 1 nm X射线用于近距离X射线光刻，并显示出低至75 nm的特征尺寸分辨率。使用Mylar胶带靶对生物细胞进行紧凑的高分辨率X射线和X线断层扫描，还证实了窄线宽X射线（λ/Δλ〜600）在532 nm至3.37 nm范围内具有1％的转换效率。开发了独特的机械百叶窗，以阻止目标材料上所有烧蚀的碎屑，这些碎屑会损坏和污染易碎的X射线光学器件。

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