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首页> 外文会议>ICMIT 2005: Mechatronics, MEMS, and Smart Materials >A new method for calculating the microstructural stiffness of MEMS devices
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A new method for calculating the microstructural stiffness of MEMS devices

机译：一种计算MEMS器件的微结构刚度的新方法

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摘要

The stiffness of microstructures is an important parameter for MEMS devices. This parameter is usually obtained by using a FEM approach, from which it is difficult to obtain an analytical expression. A microaccelerometer with a complex microstructure was designed in the present study. Its main-axial stiffness was calculated by a force method and energy method. The theoretical results are consistent with that of the FEM approach. After applying this method to the stiffness analysis of other MEMS devices, such as a micromirror, symmetric four-beam structure, and a typical comb-finger capacitive microaccelerometer, it can be concluded that this methodology is applicable to the stiffness analysis of symmetric and statically indeterminate microstructures.
机译：微结构的刚度是MEMS器件的重要参数。通常使用FEM方法获得此参数，很难从中获得解析表达式。在本研究中设计了具有复杂微结构的微加速度计。用力法和能量法算出其主轴刚度。理论结果与有限元方法一致。将这种方法应用于其他MEMS器件的刚度分析后，例如微镜，对称四光束结构和典型的梳指电容式微加速度计，可以得出结论，该方法适用于对称和静态的刚度分析不确定的微观结构。

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