Design and Calibration of Large Dynamic Range Optical Metrology Systems

机译：大动态范围光学计量系统的设计与校准

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Optical metrology requiring a large dynamic range places several requirements on the design and operation on the instrument. In addition to being able to detect the part or wavefront shape to the required range and precision, the measurements must also be calibrated to remove the induced errors associated with operation in a non-null fashion. This paper demonstrates the need for this calibration, and presents the results of a system calibration of a non-null interferometric measurement.

机译：需要大动态范围的光学计量对仪器的设计和操作提出了一些要求。除了能够将零件或波阵面形状检测到所需的范围和精度外，还必须对测量进行校准，以消除与操作相关的非零误差。本文说明了此校准的必要性，并介绍了非零干涉测量的系统校准结果。

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来源
《ICO20: Optical Devices and Instruments》|2005年|P.602403.1-602403.8|共8页
会议地点 Changchun(CN)
作者
John E. Greivenkamp;
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作者单位

College of Optical Sciences University of Arizona Tucson, AZ 85721 USA;

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会议组织
原文格式 PDF
正文语种 eng
中图分类光学仪器;
关键词
optical testing; optical metrology; aspheres; interferometry; reverse raytracing;

机译：光学测试;光学计量;非球面镜;干涉测量法;反向射线追踪;

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Design and Calibration of Large Dynamic Range Optical Metrology Systems

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