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Measurement of the birefringence distribution in high resolution laser scanning lenses

机译:高分辨率激光扫描镜头中双折射分布的测量

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摘要

We present a polarization analysis system to measure the birefringence of scanning lens. This technique is based on rotating-analyzer ellipsometer. The liquid immersion method is applied to measure the birefringence distribution regardless of the shape of the test lens. In this report, the principle of the two dimensional measurement system and the result of 2-D birefringence distribution in scanning lens are presented.
机译:我们提出一种偏振分析系统来测量扫描透镜的双折射。该技术基于旋转分析仪椭偏仪。不管测试透镜的形状如何,均采用液浸法测量双折射分布。在这份报告中,提出了二维测量系统的原理以及扫描透镜中二维双折射分布的结果。

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