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首页> 外文会议>ICO20: Optical Devices and Instruments >The Research of Basing On Simulative Compensator And Two-Wavelength Phase Shifting Interferometry For Testing Large Departure Aspheric Surface
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The Research of Basing On Simulative Compensator And Two-Wavelength Phase Shifting Interferometry For Testing Large Departure Aspheric Surface

机译：基于模拟补偿器和两波长相移干涉法测试大离焦非球面的研究

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摘要

Aiming at null measurement has the flaws of narrow-scale and high cost, authors present a novel measure method with large-scale and low cost to test steeper aspheric surface, namely, simulative compensator and two wave-length phase shifting interferometry. Basing on principle of two-wavelength interferometry and computer-stored compensator, we apply the simulative compensator into the two-wavelength phase shifting interferometer, and it will enlarge the measure scale. In order to decrease the high frequency, compare the standard wavefront produced by simulative compensator with interferential pattern produce by interferometer, the departure between the standard wavefront and interferential pattern is processed the least by adjusting standard wavefront. During the date sample and process, we use sub-Nyquist principle to enlarge measure scale. According to computer simulation result demonstrate that the simulative compensator and two wave-length interferometry presented by this paper can test large departure aspheric surface, the departure of aspheric surface from best fitting sphere attain to thousand wave length. The measure scales of the novel metrology is larger several hundred wavelength than conventional non-null interferometry, and overcome the trivial narrow-scale of null interferometry.
机译：针对零位测量存在规模小，成本高的缺陷，作者提出了一种新型的大规模，低成本的方法来测试较陡的非球面，即模拟补偿器和两次波长相移干涉法。基于二波长干涉测量原理和计算机存储的补偿器，将模拟补偿器应用于二波长相移干涉仪中，将扩大测量范围。为了降低高频，将模拟补偿器产生的标准波前与干涉仪产生的干涉图进行比较，通过调整标准波前，可以最小化处理标准波前和干涉图之间的偏差。在日期采样和处理过程中，我们使用次奈奎斯特原理来扩大度量范围。根据计算机仿真结果表明，本文提出的仿真补偿器和两种波长干涉仪可以测试较大的离球非球面，使非球面从最佳拟合球的偏离达到千波长。与传统的非零干涉法相比，该新型计量学的测量规模更大了几百个波长，并且克服了零干涉法的琐碎狭窄规模。

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