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Analyzing tolerance of grazing angle for hard x-ray Kirkpatrick-Baez microscopes

机译：分析硬X射线Kirkpatrick-Baez显微镜的掠射角公差

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K-B microscope intended for the use in inertial confinement fusion experiments was designed. The microscope operates at the 8keV x-ray energy and provides the 8X magnification. The parameters of the microscope are decided by requirements of ICF experiments. Ray tracing software (Zemax) is used to simulate optical system performance. Grazing angle range on the surface of mirrors and the assembly tolerance of centre grazing incident angle were both calculated. For the working energy is 8 keV, in order to obtain sufficient reflectivity at about 1° grazing angle on each mirror, multilayer should be coated on the mirrors. Two kinds of multilayer, periodic multilayer and non-periodic multilayer (supermirror), are discussed in the paper. Take into account the grazing angle ranges on the mirrors and the grazing angle tolerance, it is necessary to have a fairly constant reflectivity over a wide angular domain. Periodic multilayer has narrow bandpass, which cannot fulfill the requirement of such wide angular domain. The non-periodic structure multilayer was designed and fabricated. The results show this kind of non-periodic multilayer can be used in K-B microscope
机译：设计了用于惯性约束融合实验的K-B显微镜。显微镜以8keV X射线能量工作，并提供8X放大倍率。显微镜的参数由ICF实验的要求决定。光线追踪软件（Zemax）用于模拟光学系统性能。分别计算了镜面上的掠角范围和中心掠入射角的装配公差。由于工作能量为8 keV，为了在每个反射镜上以约1°的掠射角获得足够的反射率，应在反射镜上镀多层膜。本文讨论了两种多层，周期性多层和非周期性多层（超镜）。考虑到反射镜上的掠射角范围和掠射角公差，有必要在宽角度范围内具有相当恒定的反射率。周期性多层具有窄的带通，这不能满足这种宽角域的要求。设计和制造了非周期性结构多层。结果表明，这种非周期性多层膜可用于K-B显微镜

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