Advances in Interferometric Surface Measurement

机译：干涉表面测量的进展

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The addition of electronics, computers, and software to interferometry has provided tremendous improvements in the measurement of surface shape and roughness. This talk will describe three such improvements; use of computer generated holograms for testing aspheric surfaces, techniques for performing interferometric measurements more accurate than the reference surface, and two single-shot phase-shifting interferometric techniques for reducing the sensitivity of an optical test to vibration and measuring dynamically changing surface shapes.

机译：在干涉测量中增加了电子设备，计算机和软件，这在表面形状和粗糙度的测量方面提供了巨大的改进。本演讲将描述三个这样的改进；使用计算机生成的全息图测试非球面表面，比参考表面更精确地执行干涉测量的技术，以及两种用于降低光学测试对振动的敏感性和测量动态变化的表面形状的单次相移干涉技术。

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来源
《ICO20: Optical Devices and Instruments》|2005年|P.602401.1-602401.11|共11页
会议地点 Changchun(CN)
作者
James C. Wyant;
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作者单位

College of Optical Sciences, University of Arizona, Tucson, AZ 85721;

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会议组织
原文格式 PDF
正文语种 eng
中图分类光学仪器;
关键词
interferometry; optical testing; metrology; phase measurement; measurement;

机译：干涉测量;光学测试;计量学;相位测量;测量;

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专利

1. Advances in interferometric length measurements of short gauge blocks [J] . A. Titov, I. Malinovsky, H. Belaidi Metrologia: International Journal of Scientific Metrology: = Internationale Zeitschrift fur Wissenschaftliche Metrologie: = Journal International de Metrologie Scientifique . 2000,第2期

机译：短规格块的干涉式长度测量的进展
2. On the speckle number of interferometric velocity and distance measurements of moving rough surfaces [J] . Robert Kuschmierz, Nektarios Koukourakis, Andreas Fischer, Optics Letters . 2014,第19期

机译：关于运动粗糙表面的干涉速度和距离测量的斑点数
3. Limits for interferometric measurements on rough surfaces in streaming inhomogeneous media [J] . Christoph Gerhard, Andreas Stephen, Frank Vollertsen Production Engineering . 2010,第2a3期

机译：流异质介质中粗糙表面上的干涉测量极限
4. Advances in Interferometric Surface Measurement [C] . James C. Wyant International conference on photonics solutions . 2013

机译：干涉表面测量的进展
5. Error analysis and data reduction for interferometric surface measurements [D] . Zhou, Ping 2009

机译：干涉表面测量的误差分析和数据减少
6. Interferometric diffuse correlation spectroscopy improves measurements at long source–detector separation and low photon count rate [O] . Mitchell B. Robinson, David A. Boas, Sava Sakadzic, 2020

机译：干涉测量漫射相关光谱通过长源检测器分离和低光子计数率改善了测量
7. Supplementary material to quot;GPS Interferometric Reflectometry measurements of ground surface elevation changes in permafrost areas in northern Canadaquot; [O] . Jiahua Zhang, Lin Liu, Yufeng Hu 2019

机译：“加拿大北部永久冻土地区地面升高变化的GPS干涉反射仪测量”的补充材料“
8. Characterization of mirror and polished surfaces with a digital interferometric measurement system. Final report [R] . 1997

机译：使用数字干涉测量系统表征镜面和抛光表面。总结报告

Advances in Interferometric Surface Measurement

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