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首页> 外文会议>ICO20: Optical Devices and Instruments >The effect of transparent film on its surface 3-D mapping by using vertical scanning white light interferometer
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The effect of transparent film on its surface 3-D mapping by using vertical scanning white light interferometer

机译：垂直扫描白光干涉仪对透明膜表面3D映射的影响

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摘要

We have investigated the effect of transparent thin film while mapping its surface profile by using vertical scanning white light interferometer. Our theory analysis showed that multiple reflections taking place within the transparent thin film result in an extra phase change. The simulation and experiment results revealed that this extra phase change is also related to the thickness of thin film, the numerical number of microscope interferometer objective and the spectral distribution of light source. As a result of extra phase change, the interfcrogram has some deviation in its shape or two interference fringes may appears while the thickness of thin film is large.
机译：我们已经研究了透明薄膜的效果，同时使用垂直扫描白光干涉仪绘制了其表面轮廓。我们的理论分析表明，透明薄膜内发生的多次反射会导致额外的相变。仿真和实验结果表明，这种额外的相变还与薄膜的厚度，显微镜干涉仪物镜的数值和光源的光谱分布有关。由于额外的相变，干涉图的形状有些偏差，或者在薄膜的厚度较大时会出现两个干涉条纹。

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