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Measurement Of Resonant And Metastable Densities In A Low Pressure, Microwave Driven, Micro Argon Plasma By Optical Emission Spectroscopy

机译：用光发射光谱法测量低压微波驱动的微氩等离子体中的共振和亚稳密度

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Summary form only given. Micro-electromechanical systems (MEMS) have a broad area of application in modern technology. Nanostructured sensors allow the shrinkage of measuring systems to micrometer size (lab-on-a-chip). The authors present a micro-fabricated mass spectrometer equipped with a low pressure argon plasma source driven at a frequency of 2.45 GHz. An antenna creates a cylindrical shaped plasma volume of 250 μm in radius and 300 μm in height surrounded by borosilicate glass and electrically conducting silicon. Due to their invasive nature, many conventional techniques for characterization of technical plasmas, e.g. Langmuir probes, fail.

机译：仅提供摘要表格。微机电系统（MEMS）在现代技术中具有广泛的应用领域。纳米结构的传感器允许将测量系统缩小到微米级（芯片实验室）。作者介绍了一种微型质谱仪，该质谱仪配备了以2.45 GHz频率驱动的低压氩等离子体源。天线产生一个半径为250μm，高度为300μm的圆柱状等离子体，并被硼硅酸盐玻璃和导电硅包围。由于它们的侵入性，用于表征工业等离子体的许多常规技术，例如激光等离子体。 Langmuir探测失败。

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来源
《IEEE International Conference on Plasma Science》|2017年|1-1|共1页
会议地点 Atlantic City(US)
作者
Patrick Hermanns; Bastian Hillebrand; Marcel Fiebrandt; Peter Awakowicz;
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作者单位

Institute of Electrical Engineering and Plasma Technology Ruhr University Bochum Bochum 44801 Germany;

Institute of Electrical Engineering and Pla;

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关键词
Plasmas; Plasma measurements; Argon; Microwave measurement; Optical variables measurement; Nonlinear optics; Stimulated emission;

机译：血浆;血浆测量；氩气微波测量；光学变量测量；非线性光学受激发射;

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专利

1. Absorption spectroscopy measurements of argon metastable and resonant atom density in atmospheric pressure Ar-He surface-wave plasmas using a low pressure lamp [J] . J. Munoz, J. Margot, M. D. Calzada Journal of Applied Physics . 2012,第2期

机译：低压灯在大气压Ar-He表面波等离子体中氩亚稳和共振原子密度的吸收光谱测量
2. A robust method to measure metastable and resonant state densities from emission spectra in argon and argon-diluted low pressure plasmas [J] . Schulze M, Yanguas-Gil A, von Keudell A, Journal of Physics, D. Applied Physics: A Europhysics Journal . 2008,第6期

机译：一种从氩气和氩气稀释的低压等离子体的发射光谱中测量亚稳态和共振态密度的可靠方法
3. Determination of metastable level densities in a low-pressure inductively coupled argon plasma by the line-ratio method of optical emission spectroscopy [J] . Lee Y.-K., Moon S.-Y., Oh S.-J., Journal of Physics, D. Applied Physics: A Europhysics Journal . 2011,第28期

机译：线致发射光谱法测定低压电感耦合氩等离子体中的亚稳能级密度
4. Measurement Of Resonant And Metastable Densities In A Low Pressure, Microwave Driven, Micro Argon Plasma By Optical Emission Spectroscopy [C] . Patrick Hermanns, Bastian Hillebrand, Marcel Fiebrandt, IEEE International Conference on Plasma Sciences . 2017

机译：通过光发射光谱测量低压，微波驱动，微波氩等离子体中的谐振和亚稳密度
5. Miniature microwave plasmas of hydrogen and argon investigated using optical emission spectroscopy. [D] . Story, David. 2006

机译：氢和氩的微型微波等离子体使用光发射光谱法研究。
6. Absolute Spatially- and Temporally-Resolved Optical Emission Measurements of rf Glow Discharges in Argon [O] . S. Djurović, J. R. Roberts, M. A. Sobolewski, 1993

机译：氩气中射频辉光放电的绝对时空分辨光发射测量
7. Characterization of an Atmospheric-Pressure Argon Plasma Generated by 915 MHz Microwaves Using Optical Emission Spectroscopy [O] . Robert Miotk, Bartosz Hrycak, Mariusz Jasiński, 2017

机译：使用光学发射光谱法表征915MHz微波产生的大气压氩等离子体

Measurement Of Resonant And Metastable Densities In A Low Pressure, Microwave Driven, Micro Argon Plasma By Optical Emission Spectroscopy

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