Evaluation of Ion Flux in Ar and SF

机译：Ar和SF中离子通量的评估

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Summary form only given. The measurement of ion flux to the bias-electrode in contact with the plasma is an important parameter for characterization of processes assisted by energetic reactive ions [1]. However, the experimental determination of this flux is not a trivial task causing it to be theoretically estimated in most cases. In this work, the ion flux in the bias-electrode of an asymmetric capacitive discharge was estimated by three different methods: i) a non-invasive experimental method proposed by Mateev et al. where the ion flux is estimated from a theory that uses the radio-frequency (rf) power versus V

机译：仅提供摘要表格。到与等离子体接触的偏压电极的离子通量的测量是表征由高能反应性离子辅助的过程的重要参数[1]。但是，对这种通量进行实验确定并不是一件容易的事，这导致在大多数情况下都需要对其进行理论上的估算。在这项工作中，通过三种不同的方法估算了不对称电容性放电的偏置电极中的离子通量：i）Mateev等人提出的非侵入性实验方法。其中的离子通量是根据使用射频（rf）功率与V的理论估算的

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《IEEE International Conference on Plasma Science》|2017年|1-1|共1页
会议地点 Atlantic City(US)
作者
Jhonatan S. Brandão; Anelise C. O. C. Doria; Rodrigo S. Pessoa; Homero S. Maciel; Gilberto Petraconi;
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作者单位

University of Vale do Paraíba/Laboratory of Nanotechnology and Plasmas Processes Av. Shishima Hifumi São José dos Campos SP 12244-000 Brazil;

University of Vale do Paraíba/Laboratory of Nanotechnology and Plasmas Processes Av. Shishima Hifumi São Jo;

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Ions; Plasmas; Radio frequency; Sulfur hexafluoride; Probes; Temperature measurement; Gases;

机译：离子；血浆;无线电频率;六氟化硫；探针;温度测量；气体;

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Evaluation of Ion Flux in Ar and SF

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