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首页> 外文会议>IEEE International Conference on Mechatronics and Automation; 20060625-28; Luouang(CN) >Research on Thermal Characteristic in Slow-Small Temperature Changing for MEMS Linear Vibration Gyroscope
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Research on Thermal Characteristic in Slow-Small Temperature Changing for MEMS Linear Vibration Gyroscope

机译：MEMS线性振动陀螺仪缓慢小温度变化的热特性研究

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摘要

Silicon-MEMS gyroscope is an important part of MEMS (Micro Electrical Mechanical System). There are some disturbances ignored in traditional macro gyroscope that must be evaluated newly because of its smaller size (reaching the level of micron). In these disturbances, the temperature changing largely influences the performance of MEMS gyroscope. The temperature influence include static, dynamic and momentary characteristic. The static characteristic means that the temperature is changed slowly. It influences the size of the configuration and the elastomeric modulus of the material. This paper analyzes the static characteristic only. There are several kinds of MEMS gyroscopes now. In this paper, a MEMS linear vibration gyroscope is researched. The changing of the configuration of the gyroscope due to temperature changing is analyzed using Matlab. And the relationship between the amplitude and phase of the measure-axis and the temperature is derived also through analyzing the influence of temperature on material flexible modulus.
机译：硅MEMS陀螺仪是MEMS（微机电系统）的重要组成部分。在传统的宏陀螺仪中，由于其尺寸较小（达到微米级别），因此必须重新评估一些扰动。在这些干扰中，温度变化会极大地影响MEMS陀螺仪的性能。温度影响包括静态，动态和瞬时特性。静态特性意味着温度变化缓慢。它影响结构的尺寸和材料的弹性模量。本文仅分析静态特性。现在有几种MEMS陀螺仪。本文研究了一种MEMS线性振动陀螺仪。使用Matlab分析了由于温度变化而导致的陀螺仪配置变化。通过分析温度对材料弹性模量的影响，得出了测量轴的幅值和相位与温度的关系。

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