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首页> 外文会议>IMAPS 2008 - 41st international symposium on microelectronics: bringing together the entire microelectronics supply chain >Automatic Optical Inspection of Ceramic Thick Film, Thin Film Hybrids and LTCCs
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Automatic Optical Inspection of Ceramic Thick Film, Thin Film Hybrids and LTCCs

机译：陶瓷厚膜，薄膜混合材料和LTCC的自动光学检查

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摘要

Automatic Optical Inspection (AOI) is becoming a very important aspect in the production of hybrids and LTCC. The substrate size of hybrids and LTCC is getting bigger and, at the same time, the structures of the layers and defect sizes are getting smaller. Therefore visual inspection is getting more and more time-consuming and unreliable.rnTransmission, reflection and absorption of materials are dependent on the wavelength of the incoming light. Therefore different materials require different lighting solutions in order to highlight all defects. The presented patented AOI technique uses multiple lighting solutions from UV to IR which can also be combined if needed to meet the requirements. But not only is the wavelength of the lighting critical, the structure of it is just as important. Inspection of highly reflective material like wet print needs a different approach than dry print. An extremely inhomogeneous reflective material like the polycrystalline silicon of solar cells requires a different structured light than a textured silicon surface. A fast area-scan camera is used which acquires images on the fly reducing inspection time and keeping up with increasing production rates. Sophisticated image processing software delivers repeatable results and helps to find production errors.rnThis work presents various defects on different materials and their detection with a patented AOI technique which is reliable and highly flexible.
机译：自动光学检查（AOI）成为混合动力车和LTCC生产中非常重要的方面。杂化物和LTCC的基板尺寸越来越大，同时，层的结构和缺陷尺寸也越来越小。因此，目视检查越来越耗时且不可靠。材料的透射，反射和吸收取决于入射光的波长。因此，不同的材料需要不同的照明解决方案以突出所有缺陷。提出的专利AOI技术使用了从UV到IR的多种照明解决方案，也可以根据需要组合使用。但是，不仅照明的波长很关键，而且其结构也很重要。对高反射率材料（如湿打印）的检查与干打印需要的方法不同。像太阳能电池的多晶硅这样的极不均匀的反射材料，其所需的结构化光与纹理化的硅表面不同。使用了快速面扫描相机，可以即时获取图像，从而减少了检查时间并保持了生产率的提高。先进的图像处理软件可提供可重复的结果，并有助于发现生产错误。这项工作可通过可靠且高度灵活的AOI专利技术，对不同材料上的各种缺陷以及缺陷进行检测。

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