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首页> 外文会议>IMAPS 2008 - 41st international symposium on microelectronics: bringing together the entire microelectronics supply chain >Laser and Camera Inspection Technologies for On-Line Defect Detection
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Laser and Camera Inspection Technologies for On-Line Defect Detection

机译：用于在线缺陷检测的激光和照相机检测技术

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摘要

Manufacturers of microelectronics media (ceramics, film, foil, etc.) are under enormous pressure to maximize throughput rates, while maintaining high quality and yield. Automatic inspection systems can achieve these objectives, concurrently, if the correct inspection system is installed. The difficulty is matching the inspection problem against a dizzying array of inspection system solutions.rnInspection system design represents the integration of four disciplines - optics, electronics, mechanical engineering and software. The disciplines must play together, as a system, like a symphony. And, like a symphony, there are lead disciplines and supporting disciplines.rnThis paper serves as a guide for MCM manufacturers who must address the issue of on-line inspection of base material, laminates and coatings. It defines the underlying principles behind the selection of an inspection system. The optical solution is presented as the critical issue. Laser and camera technologies are compared and guidelines for the selection are given.
机译：微电子介质（陶瓷，薄膜，箔等）的制造商承受着巨大的压力，需要在保持高质量和高产量的同时最大化生产率。如果安装了正确的检查系统，则自动检查系统可以同时实现这些目标。困难在于将检查问题与一系列令人眼花inspection乱的检查系统解决方案相匹配。检查系统设计代表了光学，电子，机械工程和软件这四个学科的集成。各学科必须像交响乐一样作为一个系统共同发挥作用。而且，就像交响乐一样，这里有领导学科和支持学科。本文为必须解决基础材料，层压板和涂料在线检查问题的MCM制造商提供了指南。它定义了检查系统选择背后的基本原理。光学解决方案是关键问题。比较了激光和相机技术，并给出了选择指南。

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