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首页> 外文会议>Inorganic thin films and coatings >Preparation and Properties of ZnO/ZAO Double-Layers Thin Films on the Substrate of Glass
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Preparation and Properties of ZnO/ZAO Double-Layers Thin Films on the Substrate of Glass

机译：玻璃基板上ZnO / ZAO双层薄膜的制备及性能

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摘要

Aluminium zinc oxide(ZAO) thin films were deposited on soda-lime-silica glass substrate by middle frequency power magnetron sputtering. Then zinc oxide (ZnO) thin films were deposited above ZAO thin films by electrochemical deposition method at different time. ZAO thin films and ZnO/ZAO double-layers thin films were characterized by X-ray diffraction (XRD) and scanning electron microscope (SEM). A four-point probe was used to determine the resistivity of the films. The optical transmittance of ZAO films and ZnO/ZAO films was measured by UV-visible spectrum. The results represent that the transmittance of ZAO/ZnO thin films decreases gradually with deposition time increasing. When the deposition time is 5 minutes, the maximum transmittance of ZnO/ZAO films reaches to 85% at wavelength from 400nm to 600nm, and the thickness and resistivity of thin film are 610nm and 2.04×10~3Ω·cm, respectively. However, the thickness and resistivity are highest when the deposition time is 20 minutes, which reaches to 808nm and 1.2×10~(-2)Ω·cm. Meanwhile, the lattice constants a and c of ZAO/ZnO thin films demonstrate an expansion with deposition time increasing. In essence, good-quality double-layers thin films of ZnO/ZAO play an important role in CIGS solar cells.
机译：通过中频功率磁控溅射在铝石灰硅玻璃基板上沉积了铝锌氧化物（ZAO）薄膜。然后在不同的时间通过电化学沉积方法在ZAO薄膜上方沉积氧化锌（ZnO）薄膜。通过X射线衍射（XRD）和扫描电子显微镜（SEM）对ZAO薄膜和ZnO / ZAO双层薄膜进行了表征。使用四点探针确定膜的电阻率。通过紫外可见光谱测量ZAO膜和ZnO / ZAO膜的透光率。结果表明，随着沉积时间的增加，ZAO / ZnO薄膜的透射率逐渐降低。当沉积时间为5分钟时，ZnO / ZAO膜在400nm至600nm波长下的最大透射率达到85％，薄膜的厚度和电阻率分别为610nm和2.04×10〜3Ω·cm。然而，当沉积时间为20分钟时，厚度和电阻率最高，达到808nm和1.2×10〜（-2）Ω·cm。同时，ZAO / ZnO薄膜的晶格常数a和c随着沉积时间的增加而膨胀。本质上，高质量的ZnO / ZAO双层薄膜在CIGS太阳能电池中起着重要的作用。

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  • 来源
    《Inorganic thin films and coatings》|2012年|150-154|共5页
  • 会议地点 Guilin(CN)
  • 作者

    Guishan Liu; Mingjun Wang; Zhiqiang Hu; Yanyan JiangR; Xiaoyue Shen;

  • 作者单位

    Liaoning Province Key Laboratory of New Materials and Material Modification, Institute of New Energy Materials, Dalian Polytechnic University, Dalian116034, China;

    Liaoning Province Key Laboratory of New Materials and Material Modification, Institute of New Energy Materials, Dalian Polytechnic University, Dalian116034, China;

    Liaoning Province Key Laboratory of New Materials and Material Modification, Institute of New Energy Materials, Dalian Polytechnic University, Dalian116034, China;

    Liaoning Province Key Laboratory of New Materials and Material Modification, Institute of New Energy Materials, Dalian Polytechnic University, Dalian116034, China;

    Liaoning Province Key Laboratory of New Materials and Material Modification, Institute of New Energy Materials, Dalian Polytechnic University, Dalian116034, China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    ZnO/ZAO double-layers thin film; magnetron sputtering; electrochemical deposition; CIGS solar cells;

    机译：ZnO / ZAO双层薄膜；磁控溅射；电化学沉积; CIGS太阳能电池;

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