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Factors Effecting the Fracture Strength of Freestanding Diamond Films

机译：影响独立式金刚石薄膜断裂强度的因素

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摘要

As an emerging brand new type of engineering material for a variety of important high technology applications, the deep understanding of the mechanical behavior of freestanding diamond films has become an emergent task of vital importance. Unfortunately the mechanical behavior of this brand new material is not fully understood. Effects that affect the fracture strength are still not very clear except that the fracture strength of freestanding diamond films is only depended on the grain size (film thickness), and is insensitive to the microscopic defects, and the strength is considerably higher when the nucleation side is in tension than that when the growth side is in tension. However, this is not the full story. Based on the experimental date accumulated in USTB (University of Science and Technology Beijing) for high power dc arcjet diamond films, other factors that may affect the fracture strength of freestanding diamond films are discussed in detail. Effects of the quality of the diamond films, impurities (nitrogen, hydrogen, non-diamond carbon etc.), film morphology and texture, on fracture strength are discussed. Effects of the deposition parameters are explained. Advantages for small amount of nitrogen addition, and for the use of higher substrate temperatures in the increase in fracture strength are demonstrated, which have already been applied in the mass production of tool grade freestanding diamond films. It is hoped that the present paper will be helpful for those who wish to understand and use this brand new type of engineering material.
机译：作为一种新兴的新型工程材料，它可用于各种重要的高科技应用，对独立式金刚石膜的机械性能的深刻理解已成为一项至关重要的新兴任务。不幸的是，这种全新材料的机械性能尚未得到充分了解。除了单独的金刚石膜的断裂强度仅取决于晶粒尺寸（膜厚），并且对微观缺陷不敏感，并且当成核侧的强度显着更高外，影响断裂强度的影响仍然不是很清楚。与生长侧处于紧张状态时相比，处于紧张状态。但是，这还不是全部。根据在美国科学技术大学（北京科技大学）积累的大功率直流电弧喷射金刚石薄膜的实验数据，详细讨论了可能影响独立式金刚石薄膜断裂强度的其他因素。讨论了金刚石薄膜质量，杂质（氮，氢，非金刚石碳等），薄膜形态和织构对断裂强度的影响。说明了沉积参数的影响。证明了少量添加氮和在较高的基材温度下使用以提高断裂强度的优点，这些优点已在工具级独立式金刚石膜的批量生产中得到应用。希望本文对希望了解和使用这种新型工程材料的人有所帮助。

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