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首页> 外文会议>Instrumentation and Measurement Technology Conference (I2MTC), 2012 IEEE International >Challenges and limitations of nanomeasuring technology
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Challenges and limitations of nanomeasuring technology

机译：纳米测量技术的挑战与局限

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The paper describes traceable nanometrology based on nanomeasuring machines. The high performance of the machines is explained with a metrological analysis. This analysis shows some of today's limits of nanomeasuring technology. The limits are based, for instance, on the metre definition, the influence of the refractive index of the air, the violation of the Abbe comparator principle and on the instability of the machines metrological frame. There are various coordinate measuring machines which are based on different working modes: scanning probe mode, mixed scanning mode and sample scanning mode. These modes are analyzed with respect to uncertainties of measurement. The wide applications of nanomeasuring machines is realized by means of integration of optical and tactile nanoprobes.
机译：本文介绍了基于纳米测量机器的可追溯纳米计量学。通过计量分析来解释机器的高性能。该分析显示了纳米测量技术的当今局限性。例如，限制基于仪表的定义，空气折射率的影响，违反阿贝比较器原理以及机器计量框架的不稳定性。有多种基于不同工作模式的坐标测量机：扫描探针模式，混合扫描模式和样品扫描模式。针对测量的不确定性分析了这些模式。纳米测量机的广泛应用是通过光学和触觉纳米探针的集成实现的。

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