New developments in mass-transport fabrication for reliable high-performance integrated optoelectronic devices (Invited Paper)

机译：大规模生产制造中用于可靠的高性能集成光电器件的新进展（邀请论文）

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Abstract: Current investigations of material issues in mass-transport fabrication are reviewed. Evaporation loss and resulting surface roughness have been identified and simple techniques developed for effective prevention. Photoluminescence intensity degradation and improvement were observed under different experimental conditions. Evidence of defect generation associated with high transport rate has also been observed. Extension of mass transport to GaAs based heterostructure lasers showed considerable promise for advanced integrated structures with high performance and improved reliability. !15

机译：摘要：综述了目前在大规模运输制造中对材料问题的研究。已经确定了蒸发损失和由此产生的表面粗糙度，并开发了用于有效预防的简单技术。在不同的实验条件下观察到光致发光强度的下降和改善。还已经观察到与高传输速率相关的缺陷生成的证据。将传质扩展到基于GaAs的异质结构激光器显示出对具有高性能和更高可靠性的先进集成结构的巨大希望。！15

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《Integrated Optoelectronics for Communication and Processing》|1991年|p.185-193|共9页
会议地点 Boston MA(US);Boston MA(US)
作者
Zong-Long Liau; Lincoln Lab./MIT; Lexington; MA; USA.;
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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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New developments in mass-transport fabrication for reliable high-performance integrated optoelectronic devices (Invited Paper)

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