• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Interferometry '99: Applications >Surface shape measurement of tilted surfaces by wavelength scanning interferometry
【24h】

Surface shape measurement of tilted surfaces by wavelength scanning interferometry

机译：通过波长扫描干涉仪测量倾斜表面的表面形状

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Abstract: Wavelength scanning interferometry is applied for the shape measurement of tilted surfaces both diffusively reflecting and milled. We succeeded to measure those with tilt angles up to 45 degrees. We also investigated the influence of the tilt angle on accuracy and noise of the results of measurement. We found that the standard deviations of the measurement increase remarkably as the tilt angle increases owing to the more appearance of erroneous pixels. In the milled surface, the influence of the erroneous pixels is stronger than that in the diffuse surface. We also found that the accuracy of the measurement depends on the tilt angle. We compared the dependences of the standard deviations of the diffuse surface and the milled surface on the given tilt angle. We found that the tendency also depends on the surface structure.!10
机译：摘要：波长扫描干涉法用于漫反射和铣削的倾斜表面的形状测量。我们成功地测量了那些倾斜角高达45度的物体。我们还研究了倾斜角对测量结果的准确性和噪声的影响。我们发现，由于出现更多的错误像素，测量的标准偏差会随着倾斜角度的增加而显着增加。在铣削表面中，错误像素的影响比在漫射表面中的影响更大。我们还发现测量的精度取决于倾斜角度。我们比较了扩散表面和铣削表面的标准偏差对给定倾斜角的依赖性。我们发现这种趋势还取决于表面结构！10

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号