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Hybrid analysis of optical elements by interferometry and thermography

机译：通过干涉法和热成像法对光学元件进行混合分析

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Abstract: Effects of thermal deformations of optical elements may be visualized and measured by interferometric methods. They correspond to the deformation of heated optical surface and/or deformation of the wave front of the light beam propagating through optical elements. In one of the experiments the optical effects for a single optical element heated by CO$-2$/ laser were measured. Single element was combined with the second optical element for spherical aberration correction. The measurement stand used was composed of five modules: interferometers in Fizeau or Twyman-Green configuration (He-Ne, aperture 100 mm), CO$-2$/ laser with the device for changing and measuring the power of the laser beam, the substrate module, thermovision camera AGEMA 470 for temperature measuring and the module for control, registration and analysis of interferometric images. The results of measurements provide the form of the wave front shape in combination with the thermal gradient of the surface. The experimental results are compared with computer simulated effects of the optical path difference and the temperature distribution calculated by the finite element method.!8
机译：摘要：光学元件热变形的影响可以通过干涉法可视化和测量。它们对应于加热的光学表面的变形和/或穿过光学元件传播的光束的波阵面的变形。在其中一个实验中，测量了用CO $ -2 $ /激光加热的单个光学元件的光学效果。将单个元件与第二光学元件组合以进行球差校正。所使用的测量台由五个模块组成：菲索（Fizeau）或Twyman-Green配置的干涉仪（He-Ne，孔径100 mm），CO $ -2 $ /激光器以及用于更改和测量激光束功率的装置，基板模块，用于温度测量的热像仪相机AGEMA 470和用于控制，配准和分析干涉图像的模块。测量结果结合表面的热梯度提供了波阵面形状的形式。将实验结果与计算机模拟的光程差和通过有限元方法计算出的温度分布的效果进行了比较！8

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