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Fabrication and metrology of km-scale radii on surfaces of master tooling

机译：母模表面上千米级半径的制作和计量

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Abstract: The Laser Interferometer Gravitational-wave Observatory (LIGO) core optical components have been manufactured by CSIRO. These optical substrates are optically polished on a lap surface that is made of Teflon coated onto a thick rigid faceted Zerodur base. To produce the km-scale radii ($GRT 10 km) on these substrates the lap surface is shaped by abrading it with a fine ground silica plate whose radius of curvature corresponds to the one specified for the LIGO component. The plates are measured by a commercial phase stepping interferometer which is used in a grazing incidence arrangement. We describe the process of shaping and measuring the conditioning plates and laps.!5

机译：摘要：CSIRO制造了激光干涉仪重力波天文台（LIGO）核心光学组件。这些光学基板在搭接表面上进行光学抛光，该搭接表面由特氟隆制成，并涂在厚的硬质刻面Zerodur基体上。为了在这些基板上产生km级半径（$ GRT 10 km），可通过用细磨的二氧化硅板研磨研磨表面来成形研磨表面，该研磨板的曲率半径对应于LIGO组件所指定的曲率半径。通过商业相位步进干涉仪测量该板，该商业相位步进干涉仪用于掠入射布置中。我们描述了修整和测量调节板和棉卷的过程。！5

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来源
《Interferometry '99: Applications》|1999年|p.70-77|共8页
会议地点 Puttusk(PL)
作者
Achim J. Leistner; CSIRO; Lindfield NSW; Australia; Bozenko F. Oreb; CSIRO; Lindfield NSW; Australia; Jeffrey A. Seckold; CSIRO; Lindfield NSW; Australia; Christopher J. Walsh; CSIRO; Lindfield; Australia.;
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正文语种 eng
中图分类物理学;
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Fabrication and metrology of km-scale radii on surfaces of master tooling

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