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首页> 外文会议>International Conference on Engineering MIS >Capacitance link effect caracterisation in the tapped on-chip planar transformer
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Capacitance link effect caracterisation in the tapped on-chip planar transformer

机译：抽头片上平面变压器中的电容链路效应特性

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In this paper, we present the theoretical model validation of an integrated planar transformer used in MEMS electrodynamic microsensor. The structure consists of two planar inductors: an outer fixed one and an inner suspended one. If the outer inductor is biased by an AC voltage, a mutual inductance link will be created between both inductors. We present an analytical approach to determine the induced voltage when applying an AC supply current to the outer inductor. In the paper, we discuss the difference between the analytical results with and the characterization. The difference is basically due to the coupling capacitance between the inner and the outer inductors and not only, as we expected, due to the mutual inductance. The introduction of the coupling capacitance, estimated to be around 1.7pF, to our simulation confirmed the measurement performed on the planar integrated transformer.
机译：在本文中，我们介绍了用于MEMS电动微传感器的集成平面变压器的理论模型验证。该结构由两个平面电感器组成：一个外部固定电感器和一个内部悬浮电感器。如果外部电感器被交流电压偏置，则两个电感器之间将建立互感链接。我们提出一种分析方法来确定将交流电源电流施加到外部电感器时的感应电压。在本文中，我们讨论了分析结果与表征之间的区别。差异主要是由于内部和外部电感器之间的耦合电容，而不仅是我们预期的互感。在我们的仿真中引入耦合电容（估计约为1.7pF）证实了在平面集成变压器上进行的测量。

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