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首页> 外文会议>International congress on applications of lasers electro-optics >PARALLEL FEMTOSECOND LASER PROCESSING USING INTENSITY MODULATED DIFFRACTION PATTERN PRODUCED WITH SPATIAL LIGHT MODULATOR
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PARALLEL FEMTOSECOND LASER PROCESSING USING INTENSITY MODULATED DIFFRACTION PATTERN PRODUCED WITH SPATIAL LIGHT MODULATOR

机译：使用空间光调制器产生的强度调制衍射图样进行并行费秒激光加工

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摘要

Due to technical development of the adaptive optics,use of them in various laser processing applicationshas become possible. These techniques based on theadaptive optics have been applied with various lasersto generate diffraction patterns with equal intensityspots. In this paper ultrashort laser pulse ablationwith intensity modulated diffraction pattern ispresented. Diffraction patterns are generated with theComputer Generated Holograms (CGH) createdusing the Spatial Light Modulator (SLM). AppliedCGHs are designed using method based on theIterative Fourier Transform Algorithm (IFTA).Added to this Fresnel lenses are used to avoidproblems with 0th-diffraction order. With this kind ofdesigning procedure it is possible to generatediffraction patterns with intensity variation betweendiffracted spots. By intensity modulating thediffracted beams it is possible to ablate virtuallyarbitrary patterns with depth variation into thedifferent materials. In this paper different kinds ofCGHs are designed to generate various diffractionpatterns with intensity modulation. These patterns areused to ablate greyscale images directly into thesilicon using ultrashort pulses.
机译：由于自适应光学器件的技术发展，使得它们在各种激光加工应用中的使用成为可能。这些基于自适应光学的技术已应用于各种激光，以产生具有相同强度斑点的衍射图样。本文提出了具有强度调制衍射图样的超短激光脉冲烧蚀技术。衍射图样是通过使用空间光调制器（SLM）创建的计算机生成的全息图（CGH）生成的。 AppliedCGH是使用基于迭代傅里叶变换算法（IFTA）的方法设计的。菲涅耳透镜被添加到该透镜中，以避免出现0阶衍射的问题。通过这种设计程序，可以生成衍射图样在衍射光点之间具有强度变化。通过强度调制衍射光束，可以烧蚀具有不同材料深度变化的虚拟任意图案。在本文中，设计了各种CGH，以生成具有强度调制的各种衍射图样。这些图案用于使用超短脉冲将灰度图像直接烧蚀到硅中。

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