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首页> 外文会议>International Conference on Adaptive Structures and Technologies; 20051009-12; Paris(FR) >POWER HARVESTING FROM VIBRATIONS USING A PIEZOELECTRIC MEMS GENERATOR
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POWER HARVESTING FROM VIBRATIONS USING A PIEZOELECTRIC MEMS GENERATOR

机译：使用压电MEMS发生器从振动中获取功率

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摘要

Over the years, there has been a growing interest in the field of power harvesting technologies for low-power electronic devices such as wireless sensor networks and biomedical sensor applications. Of all possible energy sources, the mechanical vibrations have been considered a potential choice for power harvesting in a wide variety of applications. This paper presents the development of a piezoelectric MEMS generator which has the ability to scavenge mechanical energy of ambient vibrations from their surroundings and transform it into electrical energy that can be used in sensor applications. The piezoelectric MEMS generator comprises a beam structure with laminated lead zirconate titanate (Pb(Zr,Ti)O_3, PZT) material sandwiched between the upper and the lower electrodes to transform mechanical strain energy into electrical charge. A proof mass is built at the end of the beam to adjust the structure resonant frequency of the piezoelectric MEMS generator for most adaptable to the ambient vibration of their surroundings. To improve the piezoelectric MEMS generator fabrication process, a self-made PZT deposition chamber which could deposit PZT thin film up to tens micron in minutes was used to deposit the piezoelectric layer on the beam structure of the piezoelectric MEMS generator. A feasibility study of the piezoelectric MEMS generator is performed and the some test results will also be presented.
机译：多年来，人们对低功率电子设备（例如无线传感器网络和生物医学传感器应用）的功率收集技术领域越来越感兴趣。在所有可能的能源中，机械振动已被认为是广泛应用中功率收集的潜在选择。本文介绍了压电MEMS发生器的开发，该发生器具有从周围环境中清除环境振动的机械能并将其转换为可用于传感器应用的电能的能力。压电MEMS发生器包括一个梁结构，该梁结构具有夹在上下电极之间的叠层钛酸锆酸铅（Pb（Zr，Ti）O_3，PZT）材料，以将机械应变能转化为电荷。在光束的末端建立了一个质量块，以调节压电MEMS发生器的结构共振频率，使其最适合其周围环境的振动。为了改善压电MEMS发生器的制造工艺，使用了可在数分钟内沉积多达数十微米的PZT薄膜的自制PZT沉积室，将压电层沉积在压电MEMS发生器的梁结构上。进行了压电MEMS发生器的可行性研究，还将给出一些测试结果。

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