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首页> 外文会议>International Conference on Digital Printing Technologies: Final Program and Proceedings; 20050918-23; Baltimore,MD(US) >Super-Resolution Imaging by Scanning Near-Field Optical Microscopy with Microfabricated Probes
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Super-Resolution Imaging by Scanning Near-Field Optical Microscopy with Microfabricated Probes

机译：通过使用微细探针扫描近场光学显微镜进行超分辨率成像

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摘要

Scanning near-field optical microscopy offers optical imaging with a resolution below the diffraction limit of λ/2. An introduction into the concept is given and its implementation into a real instrument illustrated. The most crucial pan of the instrumentation is the optical near-field probe. Our efforts concerning near-field imaging with microfabricated cantilevered probe sare reviewed. The probes are silicon beams with solid quartz tip, which is completely covered with a 60-nm thick layer of aluminum. The demonstrated contrast mechanisms comprise transmission and fluorescence. In the latter case an artifact free 'true' optical resolution of 32 nm is shown. The influence of the polarization on the optical resolution is discussed. Best performance is achieved, when directly transmitted linear polarized is blocked and only components of radial polarized light, which originates from a supported eigenmode of the probe, is detected.
机译：扫描近场光学显微镜可提供分辨率低于λ/ 2衍射极限的光学成像。给出了对该概念的介绍，并说明了其在实际仪器中的实现。仪器中最关键的部分是光学近场探头。回顾了我们有关使用微型悬臂探针进行近场成像的工作。探针是带有实心石英尖端的硅束，该尖端完全被60 nm厚的铝层覆盖。所证明的对比机制包括透射和荧光。在后一种情况下，显示了32 nm的无伪像的“真实”光学分辨率。讨论了偏振对光学分辨率的影响。当直接透射的线性偏振光被阻挡并且仅检测到径向偏振光的分量（来自探头的受支持本征模）时，可实现最佳性能。

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