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首页> 外文会议>International Conference of the European Society for Precision Engineering and Nanotechnology vol.1; 20050508-11; Montpellier(FR) >Geometrical Characterisation of MST and Microfluidic Devices Using Novel Surface Metrology Techniques
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Geometrical Characterisation of MST and Microfluidic Devices Using Novel Surface Metrology Techniques

机译：使用新型表面计量技术对MST和微流体装置进行几何表征

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摘要

The manufacture and fabrication of MST and microfluidic devices is now a hugely expanding technology with new applications stretching from electronics to biotechnology. A major technological hurdle for the mass production and development of these devices is the difficulties associated with the geometrical metrology and surface metrology. The difficulties lie around the ability to separate and quantify zones of differing planer height and then being able to analyse the topographies of the zones individually. Complicated surfaces pose particular difficulties in terms of establishing measurement datums and levelling data. These problems are further accentuated by the limited size of data sets available form the current metrology tools This paper makes use of edge detection and areal pattern analysis techniques to establish a basis for improved device characterisation for both MST and microfluidic devices.
机译：MST和微流体设备的制造和制造现在是一项巨大的扩展技术，其新应用从电子技术到生物技术。大规模生产和开发这些设备的主要技术障碍是与几何计量和表面计量相关的困难。困难在于能否分离和量化不同刨床高度的区域，然后能够分别分析这些区域的地形。复杂的表面在建立测量基准和找平数据方面特别困难。当前计量工具可用的数据集数量有限，这些问题进一步加剧。本文利用边缘检测和平面图分析技术，为改善MST和微流体设备的设备特性奠定了基础。

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