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Characterization of measurement effects in an MST based nano probe

机译:基于MST的纳米探针中测量效果的表征

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摘要

A tactile probe has been designed at the Eindhoven University of Technology to measure a translation of its tip with a 3D uncertainty of 20 nm or better. The suspension of this probe and the electrical connections are manufactured in a series of etching and deposition steps and can be considered to be a Micro Electro-Mechanical System (MEMS). It will be shown that hysteresis effects can have a dominant influence on the probe measurement uncertainty. Several sources of hysteresis within the probe system are investigated experimentally.
机译:埃因霍温科技大学已设计出一种触觉探针,以3D不确定度为20 nm或更佳的方式测量其尖端的平移。该探针的悬架和电连接是在一系列蚀刻和沉积步骤中制造的,可以认为是微机电系统(MEMS)。结果表明,磁滞效应可能对探头测量不确定度产生主要影响。实验研究了探头系统内的几个磁滞源。

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