Study on shape measurement of glass substrates for FPD

机译：FPD用玻璃基板的形状测定研究

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In order to uncouple gravity-induced deflection and warp of a FPD glass substrates from measured results, a gravity effect elimination method which inverses substrates supported horizontally by three balls was proposed in this study. Changes in the sensitivity of triangular type optical sensors in the measurement of glass substrates and the relation between support position and deformation of FPD glass substrate were also investigated.

机译：为了从测量结果中消除FPD玻璃基板的重力引起的挠曲和翘曲，本研究提出了一种重力效应消除方法，该方法消除了三个球水平支撑的基板的反作用。还研究了三角形光学传感器在玻璃基板测量中的灵敏度变化以及支撑位置与FPD玻璃基板变形之间的关系。

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《International Conference of the European Society for Precision Engineering and Nanotechnology vol.1; 20050508-11; Montpellier(FR)》|2005年|P.29-32|共4页
会议地点 Montpellier(FR)
作者
Y. Ito; W. Natsu; M. Kunieda; N. Maruya; N. Iguchi;
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Department of Mechanical Systems Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Nakacho, Koganei, Tokyo 184-8588, Japan;

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原文格式 PDF
正文语种 eng
中图分类特种结构材料;
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1. Nippon Electric Glass Magnifies Glass Substrate Business for FPDs [J] . Asia electronics industry . 2013,第3期

机译：日本电气玻璃扩大FPD的玻璃基板业务
2. A study of the etchant for FPD glass substrate [J] . Tatsuhiro Yabune, Toshihisa Sakurai, Tadahiro Ohmi, 電子情報通信学会技術研究報告. シリコン材料·デバイス. Silicon Devices and Materials . 2001,第350期

机译：FPD玻璃基板用蚀刻剂的研究
3. A study of the etchant for FPD glass substrate [J] . Tatsuhiro Yabune, Toshihisa Sakurai, Tadahiro Ohmi, 電子情報通信学会技術研究報告. シリコン材料·デバイス. Silicon Devices and Materials . 2001,第350期

机译：FPD玻璃基板的蚀刻剂研究
4. Study on shape measurement of glass substrates for FPD [C] . Y. Ito, W. Natsu, M. Kunieda, International Conference of the European Society for Precision Engineering and Nanotechnology vol.1; 20050508-11; Montpellier(FR) . 2005

机译：FPD用玻璃基板的形状测定研究
5. Micro Glass Ball Embedded Gels to Study Cell Mechanobiological Responses to Substrate Curvatures and Local Substrate Stiffness. [D] . Lee, Sang Joo. 2016

机译：微型玻璃球嵌入式凝胶可研究细胞对基质曲率和局部基质刚度的机械力学响应。
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7. Finite Element Modal Analysis of the FPD Glass Substrates Handling Robot [O] . Li Cheng, Hongguang Wang 2014

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Study on shape measurement of glass substrates for FPD

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