Accurate and traceable 3D calibration of nanoscale standards

机译：精确且可追溯的纳米级标准3D校准

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We report on accurate and traceable 3D calibrations of nanoscale standards using metrological scanning probe microscopes. Calibrations of e.g. step height, local step height variation, mean pitch, local pitch variation and rectangularity for a number of nanoscale standards have been carried out.

机译：我们使用计量扫描探针显微镜报告纳米级标准品的准确且可追溯的3D校准。校准例如已经针对许多纳米级标准进行了台阶高度，局部台阶高度变化，平均间距，局部间距变化和矩形度。

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《International Conference of the European Society for Precision Engineering and Nanotechnology vol.1; 20050508-11; Montpellier(FR)》|2005年|P.141-144|共4页
会议地点 Montpellier(FR)
作者
Gaoliang Dai; Thorsten Dziomba; Min Xu; Ludger Koenders; Guenter Wilkening;
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Physikalisch-Technische Bundesanstalt, Braunschweig, Germany;

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正文语种 eng
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Accurate and traceable 3D calibration of nanoscale standards

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