Design and Microfabrication of MEMS 2D Gyroscope

机译：MEMS 2D陀螺仪的设计与微制造

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This paper describes the design and microfabrication of MEMS 2D microgyroscope. The MEMS 2D microgyroscope is a resonating type of gyroscope. The primary mode is driven by electrostatic rotary comb drive. The oscillations of the secondary modes are sensed by differential capacitances detection between the circular proof mass and substrate electrodes. The microfabrication of the 2D microgyroscope combines glass cavity etching, anodic boding of glass and SOI wafer as well as DRIE of device layer of SOI wafer. The MEMS 2D microgyroscope can be widely applied in navigation systems, IMU, automobiles and high-end consumer electronics.

机译：本文介绍了MEMS 2D微型陀螺仪的设计和微制造。 MEMS 2D微型陀螺仪是共振型陀螺仪。主模式由静电旋转梳状驱动器驱动。通过圆形检测质量块和基板电极之间的差分电容检测来感测次级模式的振荡。二维微陀螺仪的微细加工结合了玻璃腔蚀刻，玻璃和SOI晶片的阳极结合以及SOI晶片的器件层的DRIE。 MEMS 2D微型陀螺仪可广泛应用于导航系统，IMU，汽车和高端消费电子产品。

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来源
《International Conference on Mechanical Engineering and Mechanics vol.1; 20051026-28; Nanjing(CN)》|2005年|P.71-74|共4页
会议地点 Nanjing(CN)
作者
Tiansheng ZHOU; Changying LAI;
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作者单位

Faculty of Engineering, University of Alberta, Edmonton, T6G 2V4, Canada;

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会议组织
原文格式 PDF
正文语种 eng
中图分类机械设计、计算与制图;
关键词
MEMS; microfabrication; gyroscope; design;

机译：MEMS;微加工;陀螺仪;设计;

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机译：考虑设计变量不确定性的振动MEMS陀螺仪设计
4. Non All-silicon Micro-gyroscope Technology Based MEMS Microfabrication [C] . Xiao-bei DENG, Xiang-jun WANG Proceedings of the First Asia International Symposium on Mechatronics Theory, Method and Application . 2004

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5. Toward Navigational Grade MEMS Gyros Design, Control, and Error Mitigation of MEMS Gyroscopes [D] . Ge, Howard H. 2018

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6. Microfabrication Process-Driven Design FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope [O] . Syed Ali Raza Bukhari, Muhammad Mubasher Saleem, Umar Shahbaz Khan, 2020

机译：微型制造过程驱动的设计有限公司分析和3 DOF驱动模式的系统建模和2-DOF感测模式热稳定的非谐振MEMS陀螺仪
7. Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope [O] . Syed Ali Raza Bukhari, Muhammad Mubasher Saleem, Umar Shahbaz Khan, 2020

机译：微型制造过程驱动的设计，有限公司分析和3 DOF驱动模式的系统建模和2-DOF感测模式热稳定的非谐振MEMS陀螺仪

Design and Microfabrication of MEMS 2D Gyroscope

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