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Development of a Low-cost Focusing Probe for Edge Detection of Micro Holes

机译:用于微孔边缘检测的低成本聚焦探头的开发

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The edge detection of micro holes is difficult to achieve if the hole diameter is smaller than the probe diameter of the micro touch-trigger probe.This paper presents a non-contact probe with a blue-ray DVD pick-up head as the sensor.It is based on the focusing principle that the reflected light intensity will be maximal when the tested surface is on the focus point of the probe.When the focused beam scans across the edge of the hole,the reflected light intensity will be gradually reduced.Theoretical analysis is studied to derive the light intensity equation when the focused beam is passing through the edge.Experimental tests of the developed probe in association with a nano-positioning stage were carried out.The edge position can be obtained to the resolution of 1 nm and standard deviation of about 30 nm.This performance is beyond the diffraction limit of optical microscope.
机译:如果孔径小于微型触发式探针的探针直径,则很难实现微孔的边缘检测。本文提出了一种非接触式探针,其具有蓝光DVD拾取头作为传感器。根据聚焦原理,当被测表面在探头的焦点上时,反射光强度将达到最大。当聚焦光束扫描到孔的边缘时,反射光强度将逐渐降低。分析研究以得出聚焦光束穿过边缘时的光强度方程式。对与纳米定位平台相关联的已开发探针进行了实验测试,获得了边缘位置的分辨率为1 nm和标准偏差约为30 nm,此性能超出了光学显微镜的衍射极限。

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