The optimum design of micro-motion stage based on flexible hinge

机译：基于柔性铰链的微动平台的优化设计

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This paper presents a particle swarm algorithm with a compress factor optimization approach to optimize the parameters of the flexure-based micro-motion stage.The experimental results based on finite element analysis (FEA) shows that the micro-motion stage designed by this optimization approach can make a well-balanced compromise between the stroke and the natural frequency of the flexure-based mechanism.The proposed optimization approach is suitable for the design of the flexure-based micro-motion stage.

机译：本文提出了一种基于粒子群算法的压缩因子优化方法来优化基于挠曲的微运动平台的参数。基于有限元分析（FEA）的实验结果表明，采用该优化方法设计的微运动平台可以在基于挠曲的机构的行程和固有频率之间取得平衡，折衷。所提出的优化方法适用于基于挠曲的微运动平台的设计。

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来源
《International conference on mechatronics technology》|2012年|462-466|共5页
会议地点 Tianjin(CN)
作者
Xiao-Chen Li; Yan-Ling Tian; Fu-Jun Wang; Da-Wei Zhang; Wei-Guo Gao;
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作者单位

Institute of Micro-Electro-Mechanical System(MEMS), Tianjin University, Tianjin, China;

Institute of Micro-Electro-Mechanical System(MEMS), Tianjin University, Tianjin, China;

Institute of Micro-Electro-Mechanical System(MEMS), Tianjin University, Tianjin, China;

Institute of Micro-Electro-Mechanical System(MEMS), Tianjin University, Tianjin, China;

Institute of Micro-Electro-Mechanical System(MEMS), Tianjin University, Tianjin, China;

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原文格式 PDF
正文语种 eng
中图分类 TH15;
关键词
micro-motion stage; particle swarm algorithm(PSO); flexure-based mechanism; the optimized design;

机译：微动平台；粒子群算法；基于挠度的机构；优化设计;

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专利

1. Optimal design of a flexure hinge based XYθ wafer stage [J] . Jae W. Ryu, Dae-Gab Gweon, Kee S. Moon Precision Engineering . 1997,第1期

机译：基于挠性铰链的XYθ晶圆台的优化设计
2. Kinetostatic modeling of 3-RRR compliant micro-motion stages with flexure hinges [J] . Yuen Kuan Yong, Tien-Fu Lu Mechanism and Machine Theory: Dynamics of Machine Systems Gears and Power Trandmissions Robots and Manipulator Systems Computer-Aided Design Methods . 2009,第6期

机译：带有挠性铰链的符合3-RRR的微动平台的运动静态建模
3. The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages [J] . Yuen Kuan Yong, Tien-Fu Lu Mechanism and Machine Theory: Dynamics of Machine Systems Gears and Power Trandmissions Robots and Manipulator Systems Computer-Aided Design Methods . 2008,第3期

机译：挠性铰链方程的精度对平面微动平台输出顺应性的影响
4. The optimum design of micro-motion stage based on flexible hinge [C] . Xiao-Chen Li, Yan-Ling Tian, Fu-Jun Wang, International conference on mechatronics technology . 2012

机译：基于柔性铰链的微观运动阶段的优化设计
5. Design and modeling of single-axis, flexure-hinge type, micro-positioning stages. [D] . Yang, Renyi. 1995

机译：单轴挠曲铰链式微定位平台的设计和建模。
6. Development of a 3-DOF Flexible Micro-Motion Platform Based on a New Compound Lever Amplification Mechanism [O] . Fangni Cui, Yangmin Li, Junnan Qian 2021

机译：基于新型化合物杠杆放大机构的三维柔性微观运动平台开发
7. Optimal Design and Control of a z-Tilt Piezoelectric Based Nano-Scale Compensation Stage with Circular Flexure Hinges [O] . Hau-Wei Lee 2016

机译：圆形挠性铰链的Z倾斜压电基纳米尺度补偿级的最优设计与控制

The optimum design of micro-motion stage based on flexible hinge

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