Repetitive Control of Piezoelectric Actuators with Fuzzy Hysteresis Compensation in Nanopositioning Applications

机译：纳米定位应用中具有模糊滞后补偿的压电执行器的重复控制

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摘要

A new repetitive control scheme with fuzzy hysteresis compensation is proposed for cancelling out the hysteresis effect of the piezoelectric actuator in periodic trajectory tracking.The repetitive controller (RC) is designed for robustness and good tracking performance.The fuzzy hysteresis compensator is developed using the inverse of the proposed novel fuzzy-systembased hysteresis model.Experiments with 50 Hz sinusoidal and triangular trajectories show that the maximum tracking errors are reduced to 58 nm and 43 nm by the proposed controller,88％ and 87％ less than the conventional PID controller respectively.Clearly,the experiment demonstrates the efficiency of the designed controller in nanopostioning applications.

机译：为了消除压电致动器在周期性轨迹跟踪中的磁滞效应，提出了一种新的具有模糊滞后补偿的重复控制方案，设计了具有鲁棒性和良好跟踪性能的重复控制器（RC）。 50 Hz正弦和三角形轨迹的实验表明，所提出的控制器将最大跟踪误差减小到58 nm和43 nm，分别比常规PID控制器小88％和87％。显然，该实验证明了所设计的控制器在纳米定位应用中的效率。

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来源
《International conference on mechatronics technology》|2012年|533-537|共5页
会议地点 Tianjin(CN)
作者
Peng-Zhi Li; Feng Yan;
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作者单位

State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, China Academy of Science, Changchun,China;

State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, China Academy of Science, Changchun,China;

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会议组织
原文格式 PDF
正文语种 eng
中图分类 TH15;
关键词
piezoelectric actuator; nanopositioning; fuzzy; repetitive control;

机译：压电致动器;纳米定位;模糊;重复控制;

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专利

1. Simultaneous compensation of hysteresis and creep in a single piezoelectric actuator by open-loop control for quasi-static space active optics applications [J] . Xuan Wang, Valerie Pommier-Budinger, Aurelien Reysset, Control Engineering Practice . 2014,第deca期

机译：准静态空间有源光学应用的开环控制可同时补偿单个压电执行器中的磁滞和蠕变
2. Odd-harmonic repetitive control for high-speed raster scanning of piezo-actuated nanopositioning stages with hysteresis nonlinearity [J] . Li Chun-Xia, Gu Guo-Ying, Zhu Li-Min, Sensors and Actuators, A. Physical . 2016,第Null期

机译：奇谐重复控制，用于具有迟滞非线性的压电驱动纳米定位平台的高速光栅扫描
3. An Efficient Identification Method for Dynamic Systems With Coupled Hysteresis and Linear Dynamics: Application to Piezoelectric-Actuated Nanopositioning Stages [J] . Wen Zhijie, Ding Ye, Liu Pinkuan, Mechatronics, IEEE/ASME Transactions on . 2019,第1期

机译：具有磁滞和线性动力学耦合的动态系统的有效识别方法：在压电驱动纳米定位台上的应用
4. Repetitive Control of Piezoelectric Actuators with Fuzzy Hysteresis Compensation in Nanopositioning Applications [C] . Peng-Zhi Li, Feng Yan International conference on mechatronics technology . 2012

机译：纳米定位应用模糊滞后补偿压电致动器的重复控制
5. Compensation of hysteresis in piezoceramic actuators and control of nanopositioning system. [D] . Hu, Hong. 2003

机译：压电陶瓷执行器中的磁滞补偿和纳米定位系统的控制。
6. Compensation of Hysteresis in the Piezoelectric Nanopositioning Stage under Reciprocating Linear Voltage Based on a Mark-Segmented PI Model [O] . Dong An, Yixiao Yang, Ying Xu, 2020

机译：基于Mark-Segmented PI模型的往复线性电压下压电纳米定位阶段的磁滞补偿
7. Compensation of Hysteresis in the Piezoelectric Nanopositioning Stage under Reciprocating Linear Voltage Based on a Mark-Segmented PI Model [O] . Dong An, Yixiao Yang, Ying Xu, 2019

机译：基于标记分段PI模型的往复线性电压下压电纳米定位阶段滞后的补偿

Repetitive Control of Piezoelectric Actuators with Fuzzy Hysteresis Compensation in Nanopositioning Applications

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