The Dynamic Response of the Plasma on the Dust Formation in Ar/C_2H_2 RF Discharges

机译：Ar / C_2H_2 RF放电中等离子体对粉尘形成的动态响应

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Presented are investigations of the dust formation in a capacitively coupled RF discharge in Ar/C_2H_2 gas mixture. The scattered component of FTIR spectra (in-situ, multipass) used for tracing the dust growth in the plasma showed a periodicity in the dust formation correlated with a plasma dynamics response (drastic changes in positive ions concentration and a corresponding periodicity in Balmer Hα line broadening). The latter could be used as the novel diagnostic for detecting the dust formation phenomenon in its earliest stage.

机译：本文介绍了在Ar / C_2H_2混合气体中电容耦合RF放电中的粉尘形成情况。用于追踪等离子体中粉尘生长的FTIR光谱的散射分量（原位，多程）显示出粉尘形成的周期性与等离子体动力学响应相关（正离子浓度的急剧变化以及BalmerHα线的相应周期性）扩大）。后者可用作最早诊断粉尘形成现象的新型诊断仪。

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《International Conference on Phenomena in Ionized Gases(ICPIG 2003) vol.1; 20030715-20; Greifswald(DE)》|2003年|P.229-230|共2页
会议地点 Greifswald(DE)
作者
E. Kovacevic; I. Stefanovic; J. Berndt; J. Winter;
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Institute for Experimental Physics II, Ruhr-University, 44780 Bochum, Germany;

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原文格式 PDF
正文语种 eng
中图分类天然气加工;
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The Dynamic Response of the Plasma on the Dust Formation in Ar/C_2H_2 RF Discharges

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