Determination of atomic oxygen in an rf discharge by laser induced fluorescence spectroscopy

机译：激光诱导荧光光谱法测定射频放电中的原子氧

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Spatial density distributions of atomic oxygen were carried out by two photon laser induced fluorescence spectroscopy (TALLF) in a capacitively coupled discharge. Absolute amounts were determined in the middle of the discharge. While the asymmetric axial profiles could be described by a comprehensive similarity paramter, for the radial structure a comparable behaviour was not observed. Their symmetric shapes showed a density maximum at the electrode edges near to both electrodes.

机译：原子氧的空间密度分布是通过两个光子激光诱导荧光光谱法（TALLF）在电容耦合放电中进行的。在放电中间确定绝对量。尽管可以通过全面的相似性参数描述非对称轴向轮廓，但对于径向结构却没有观察到可比的行为。它们的对称形状在靠近两个电极的电极边缘处显示出最大密度。

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来源
《International Conference on Phenomena in Ionized Gases(ICPIG 2003) vol.1; 20030715-20; Greifswald(DE)》|2003年|P.111-112|共2页
会议地点 Greifswald(DE)
作者
S. Peters; B. Krames; J. Meichsner;
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作者单位

Institute of Physics, Greifswald University, Domstr. 10a, 17487 Greifswald;

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原文格式 PDF
正文语种 eng
中图分类天然气加工;
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Determination of atomic oxygen in an rf discharge by laser induced fluorescence spectroscopy

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