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首页> 外文会议>International Conference on Precision Engineering and Micro/Nano Technology in Asia vol.2; 20051112-14; Shenzhen(CN) >Stylus Tip Reconstruction for Nano Roughness Measurement by AFM
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Stylus Tip Reconstruction for Nano Roughness Measurement by AFM

机译：原子力显微镜测量纳米粗糙度的手写笔笔尖重建

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摘要

Contact stylus instrument have difficulties to be extended to nano surface roughness measurement due to the dilation of measured profile image by the nano-scale stylus tips. This research Is to develop a stylus tip reconstruction method (STRM) which is derived from image convolution of nano surface roughness measurement and to compare the effects of tip profiles based on blind reconstruction in draft standard of National Institute of Standards and Technology (MIST, USA) with nano scale standard gages by experiments. Experimental set-up is configured of an atomic force microscope (AFM), ULTRAObjective for nano surface roughness measurement to verify the developed STRM. Experimental results show that tip reconstruction with STRM are close to results obtained by blind reconstruction of stylus tips suggested by MIST draft standard in nano surface roughness measurement results calculated by SPIP (Scanning Probe Image Processor). Moreover, the STRM can be used to evaluate the effects of tip wearing to measurement results. Future works focus on effects of nano force in study of tip reconstruction for nano surface roughness.
机译：接触式测针仪由于纳米测针尖端对测得的轮廓图像的膨胀而难以扩展至纳米表面粗糙度测量。这项研究的目的是开发一种针尖修复方法（STRM），该方法源自纳米表面粗糙度测量的图像卷积，并在美国国家标准技术研究院（MIST，USA）的标准草案中基于盲重构比较针尖轮廓的效果。 ），通过实验使用纳米级标准量规。实验装置由原子力显微镜（AFM）ULTRAObjective配置，用于纳米表面粗糙度测量，以验证开发的STRM。实验结果表明，在SPIP（扫描探针图像处理器）计算出的纳米表面粗糙度测量结果中，用STRM进行的笔尖重建与MIST草案标准建议的对笔尖的盲目重建相近。此外，STRM可用于评估针尖磨损对测量结果的影响。未来的工作将重点放在纳米力在纳米表面粗糙度的尖端重建研究中的作用。

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