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首页> 外文会议>International Instrumentation Symposium; 20070430-503; Tulsa,OK(US) >HIGH ACCURACY MINIATURE PRESSURE TRANSDUCER
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HIGH ACCURACY MINIATURE PRESSURE TRANSDUCER

机译：高精度微型压力传感器

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摘要

This paper presents a ruggedized high accuracy, extremely miniature pressure transducer suitable for numerous applications where size, accuracy and environmental conditions are of critical importance. High transducer accuracy was achieved by using a highly sensitive piezoresistive pressure sensor in conjunction with high resolution digital electronics for sensor output amplification and correction. The transducer size was minimized for reducing transducer impact (such as air flow disturbance) on the installation, and for ease of installation. The pressure sensor chip has a Silicon-on-Insulator structure with piezoresistors dielectrically isolated from the deflecting diaphragm. Optimal pressure sensor geometry for low pressure (5-500 PSI) measurements was determined through Finite Element Modeling. The sensor output was corrected for temperature variations using a commercially available digital integrated circuit and a novel algorithm for computing temperature compensation coefficients. The optimized pressure transducer has an accuracy of 0.1% of full scale output at temperatures up to 250℉. The transducer has a volume of less than 0.2 cubic inches, and a bandwidth of over 10 kHz. Independent testing has confirmed transducer's high accuracy over a wide temperature range (-65℉ - 250℉). An upgraded transducer version suitable for 500℉/750℉ operability has been developed and is currently being evaluated.
机译：本文提出了一种坚固耐用的高精度，超小型压力传感器，适用于尺寸，精度和环境条件至关重要的众多应用。通过将高灵敏度的压阻压力传感器与高分辨率数字电子设备结合使用，以实现传感器输出放大和校正，可以实现较高的传感器精度。传感器尺寸最小化，以减少对安装的传感器冲击（例如气流干扰），并易于安装。压力传感器芯片具有绝缘体上的硅结构，其压电电阻器与偏转膜片电绝缘。通过有限元建模确定了用于低压（5-500 PSI）测量的最佳压力传感器几何形状。使用市售数字集成电路和用于计算温度补偿系数的新颖算法，针对温度变化对传感器输出进行了校正。经过优化的压力传感器在高达250℉的温度下的精度为满量程输出的0.1％。换能器的体积小于0.2立方英寸，带宽超过10 kHz。独立测试确认了传感器在宽温度范围（-65℉-250℉）内的高精度。已经开发出适合500℉/ 750℉操作性的升级换能器版本，目前正在评估中。

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