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ROUNDNESS MEASUREMENT AND ITS UNCERTAINTY IN AN INTERNATIONAL COMPARISON

机译:国际比较中的圆度测量及其不确定性

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摘要

A highly accurate roundness measuring instrument and the calibration system of its probe were developed. The international round robin comparison of form measurement organized by the CIRP was carried out from 1996 to 1998. The measuring results obtained by using this instrument and system correspond satisfactory to the results by PTB with very smalt measurement uncertainty. For example, the obtained roundness of zerodur sphere with 50 mm diameter is about 179 nm with 9 nm (k=2) in uncertainty of measurement, while the corresponding result by PTB is 184nm and 10nm respectively.
机译:开发出高精度的圆度测量仪及其测头校准系统。 CIRP于1996年至1998年进行了国际循环测量形式的比较。使用该仪器和系统获得的测量结果与PTB的结果相符,具有极小的测量不确定性。例如,获得的直径为50mm的Zerodur球的圆度约为179nm,测量不确定度为9nm(k = 2),而PTB的相应结果分别为184nm和10nm。

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