Integration of Chemical and Electrochemical Devices with Silicon Microelectronics Enabling Microsensors and Reactors

机译：化学和电化学装置与支持微传感器和反应器的硅微电子技术的集成

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The integration of microchemical and microelectrochemical devices with silicon IC technology is explored. The IC infrastructure brings numerous advantages and opportunities, but also liabilities. One specific example is presented where a low-k dielectric is also used as a microanalytical device. A method is presented for fabricating micro-air-channel structures encapsulated by a dielectric material using a sacrificial polymer based on polynorbornene (PNB) chemistry. Such air-channel structures are believed to have potential applications in microsensors, displays, micro-scale chemical reactors on a chip, and micro electro-mechanical devices.

机译：探索了微化学和微电化学器件与硅IC技术的集成。 IC基础设施带来许多优势和机会，但也带来了责任。提出了一个具体示例，其中低k电介质也用作微分析设备。提出了一种使用基于聚降冰片烯（PNB）化学的牺牲聚合物来制造由介电材料封装的微风道结构的方法。据信这种空气通道结构在微传感器，显示器，芯片上的微型化学反应器和微机电装置中具有潜在的应用。

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《International Symposium on Chemical and Biological Sensors and Analytical Methods II, 2001》|2001年|p.17-26|共10页
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作者
Paul A. Kohl;
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School of Chemical Engineering Georgia Institute of Technology Atlanta, GA 30332-0100;

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原文格式 PDF
正文语种 eng
中图分类自动化技术、计算机技术;
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Integration of Chemical and Electrochemical Devices with Silicon Microelectronics Enabling Microsensors and Reactors

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