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首页> 外文会议>International Symposium on Metastable, Mechanically Alloyed and Nanocrystalline Materials(ISMANAM 2004); 20040822-26; Sendai(JP) >Preparation and Characterization of Nanocrystalline Noble Metal Films by MOCVD
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Preparation and Characterization of Nanocrystalline Noble Metal Films by MOCVD

机译：MOCVD法制备纳米晶贵金属薄膜及其表征

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摘要

Noble metals such as palladium, platinum, iridium and ruthenium were prepared in ah horizontal hot-wall MOCVD apparatus using metal-acetylacetonates as precursors. A wide range of deposition conditions (T_(dep)=250-800℃ and P_(total)=0.1-500 Torr) was explored and the effects on the features of the films were investigated. Structural and morphological characteristics were found to be very sensitive to those conditions. By the use of appropriate conditions and reactive gas (H_2 or O_2), high-purity, dense and oriented films were obtained. On the other hand, films consisted of agglomerated nanocrystalline particles of pure metals or metal oxides were also possible to obtain. The size of nanoparticles varied from 15 to 100 nm depending on deposition conditions. The nanocrystalline nature of films was used for applications requiring large surface area such as electrocatalysts for electrochemical reactions of technological interest. Nanocrystalline platinum films prepared by MOCVD exhibited superior electrocatalitic activity than platinum electrocatalysts prepared by conventional methods in the hydrogen evolution reaction. In addition, iridium-ruthenium oxide films showed to be very promising for the oxygen evolution reaction.
机译：钯，铂，铱和钌等贵金属是在卧式热壁MOCVD装置中使用金属-乙酰丙酮化物作为前体制备的。探索了各种沉积条件（T_（深度）= 250-800℃，P_（总）= 0.1-500托），并研究了对薄膜性能的影响。发现结构和形态特征对那些条件非常敏感。通过使用适当的条件和反应气体（H_2或O_2），获得了高纯度，致密和取向的薄膜。另一方面，也可能获得由纯金属或金属氧化物的团聚纳米晶体颗粒组成的薄膜。纳米粒子的大小从15到100 nm不等，取决于沉积条件。膜的纳米晶体性质用于需要大表面积的应用中，例如用于技术关注的电化学反应的电催化剂。在氢气析出反应中，通过MOCVD制备的纳米晶铂膜比通过常规方法制备的铂电催化剂表现出优异的电催化活性。另外，铱-钌氧化物膜对于氧释放反应显示出非常有希望的。

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