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首页> 外文会议>International Workshop on Advanced Metallic Materials and Processing Techniques for Aeronautical Applications; 20051118-20; Nanjing(CN) >Ceramic alloying with Ti-N deposition and diffusion of multi-layers by plasma surface alloying technique
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Ceramic alloying with Ti-N deposition and diffusion of multi-layers by plasma surface alloying technique

机译：等离子表面合金化技术与Ti-N沉积和扩散多层陶瓷合金化

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摘要

High quality TiN multi-layer was obtained on steel substrate by combined technology of plasma glow discharge sputtering, hollow cathode effect and interfacial diffusion. The TiN multi-layer consists of deposition layer and diffusion layer. Its morphology, structure and chemical compositions were analyzed. The microhardness and wear resistance were measured. The results indicate that the diffusion of Ti and N into the substrate leads to a strong interfacial adhesion. The thickness of TiN multi-layer is about 10 μm. The strongest diffraction is on the (200) crystal plane of TiN. The surface hardness is about to 2300(HV_(0.1)). The wear resistance of the TiN ceramic alloying multi-layer is excellent and the friction coefficient is low under dry sliding conditions.
机译：通过等离子辉光溅射，空心阴极效应和界面扩散相结合的技术，在钢基底上获得了高质量的TiN多层膜。 TiN多层膜由沉积层和扩散层组成。分析了其形态，结构和化学组成。测量了显微硬度和耐磨性。结果表明，Ti和N扩散到基材中会导致很强的界面粘附力。 TiN多层的厚度为约10μm。最强的衍射在TiN的（200）晶面上。表面硬度约为2300（HV_（0.1））。 TiN陶瓷合金多层的耐磨性极好，在干滑条件下的摩擦系数很低。

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