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Method for measuring small displacements by using an electro-optic modulator

机译:通过使用电光调制器测量小位移的方法

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Abstract: A new method for measuring small displacements is presented. An electro-optic modulator is used to mix a carrier frequency to the reference signal and the test signals. By measuring the phase difference between these two signals, the displacements can be evaluated. It has the same high resolution as the heterodyne interferometer, and can be operated in real-time. !8
机译:摘要:提出了一种测量小位移的新方法。电光调制器用于将载波频率与参考信号和测试信号混合。通过测量这两个信号之间的相位差,可以评估位移。它具有与外差干涉仪相同的高分辨率,并且可以实时操作。 !8

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