Heterodyne common-path interferometer for testing surface roughness

机译：外差共通干涉仪，用于测试表面粗糙度

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Abstract: As a modified heterodyne interferometer the heterodyne common path interferometer for measuring surface roughness is described. The interferometer system adopts the isosceles triangle type common path interferometer in which the reference beam and the measurement beam pass through the same optical path so that the mechanical instability, air turbulence, and temperature variations will affect the same value of the optical path for both the beams. The actual height resolution is 1 angstrom, and the lateral resolution is 1 $mu@m. This modified interferometer can use general He-Ne laser which needs no frequency stabilizer and general experimental stage without shockproof. !2

机译：摘要：作为一种改进的外差干涉仪，介绍了用于测量表面粗糙度的外差共通干涉仪。干涉仪系统采用等腰三角形共通干涉仪，其中参考光束和测量光束通过相同的光路，因此机械不稳定性，空气湍流和温度变化将对两个方向的光路值产生相同的影响。梁。实际的高度分辨率为1埃，横向分辨率为1 $ mu @ m。这种改进的干涉仪可以使用不需要频率稳定器的普通He-Ne激光器和无需防震的普通实验台。！2

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来源
《Intl Symp on Optical Fabrication, Testing, and Surface Evaluation》|1992年|p.413-418|共6页
会议地点 Tokyo(JP)
作者
Chang-Yuan Han; Changchun Institute of Optics; Fine Mechanics; Changchun; Jilin; China; Bin Liu; Changchun Institute of Optics; Fine Mechanics; Changchun; Jilin; China; Zhenwu Lu; Changchun Institute of Optics; Fine Mechanics; Changchun; Jilin; China; Qu-Wu;
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正文语种 eng
中图分类无线电电子学、电信技术;
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2. Practical common-path heterodyne surface profiling interferometer with automatic focusing [J] . Zhao HZ., Li DC., Cao M., Optics & Laser Technology . 2001,第4期

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3. SPR phase sensitivity enhancement in common-path polarization heterodyne interferometer by polarization tuning [J] . Aref Seyed Hashem Optik: Zeitschrift fur Licht- und Elektronenoptik: = Journal for Light-and Electronoptic . 2018,第期

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4. Heterodyne common-path interferometer for testing surface roughness [C] . Chang-Yuan Han, Bin Liu, Zhenwu Lu, International symposium on optical fabrication, testing, and surface evaluation . 1992

机译：用于测试表面粗糙度的外差公共路径干涉仪
5. THREE-BEAM SHEARING INTERFEROMETER FOR MEASURING THIN FILM THICKNESS, SURFACE ROUGHNESS, AND SURFACE FIGURE. [D] . ALMARZOUK, KAIS. 1982

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机译：用于亚纳米表面计量的共通道，多通道外差激光干涉仪

Heterodyne common-path interferometer for testing surface roughness

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